Dr. Risaku Toda
Engineering Staff Member at Jet Propulsion Lab
SPIE Involvement:
Publications (6)

Proceedings Article | 17 February 2010 Paper
Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX
KEYWORDS: Carbon, Electronics, Logic, Switching, Aerospace engineering, X-rays, Electronic components, Logic devices, Digital electronics, Carbon nanotubes

Proceedings Article | 30 April 2008 Paper
Proc. SPIE. 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II
KEYWORDS: Aerospace engineering, Sputter deposition, Electrodes, Spectroscopy, X-rays, Copper, Scanning electron microscopy, Photomicroscopy, Commercial off the shelf technology, Carbon nanotubes

Proceedings Article | 27 April 2007 Paper
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Actuators, Mirrors, Ferroelectric materials, Electrodes, Silicon, Wavefronts, Microactuators, Space telescopes, Connectors, Semiconducting wafers

Proceedings Article | 1 July 2005 Paper
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Minerals, Resonators, Sensors, Spectroscopy, X-rays, Magnetism, Magnetic sensors, X-ray fluorescence spectroscopy, Astrobiology

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5717, MEMS/MOEMS Components and Their Applications II
KEYWORDS: Actuators, Ferroelectric materials, Electrodes, Silicon, Microactuators, Space telescopes, Relays, Deep reactive ion etching, Reactive ion etching, Semiconducting wafers

Showing 5 of 6 publications
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