Rob DeLancey
at Synopsys Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 10 April 2024 Presentation + Paper
Enas Sakr, Zac Levinson, Rob DeLancey, C. Jay Lee, Jinguang Li, Ryan Chen, Robert Iwanow, Delian Yang, Wolfgang Hoppe, Folarin Latinwo, Kevin Lucas, Peng Liu
Proceedings Volume 12954, 129540N (2024) https://doi.org/10.1117/12.3013089
KEYWORDS: Optical proximity correction, Electromagnetism, Semiconducting wafers, Extreme ultraviolet, Cadmium, 3D mask effects, Modeling, Lithography, Computational lithography, Ranging

Proceedings Article | 28 April 2023 Presentation + Paper
Enas Sakr, Rob DeLancey, Wolfgang Hoppe, Zac Levinson, Robert Iwanow, Ryan Chen, Delian Yang, Kevin Lucas
Proceedings Volume 12495, 124950P (2023) https://doi.org/10.1117/12.2658720
KEYWORDS: Extreme ultraviolet, Optical proximity correction, Multilayers, Optical lithography, Modeling, 3D mask effects

Proceedings Article | 28 April 2023 Presentation + Paper
Folarin Latinwo, Bernd Kuechler, Rob DeLancey, Hyesook Hong, Delian Yang
Proceedings Volume 12495, 1249508 (2023) https://doi.org/10.1117/12.2660580
KEYWORDS: Deformation, Photoresist materials, Modeling, Optical proximity correction, Shrinkage, Lithography, Optical lithography

Proceedings Article | 22 February 2021 Presentation
Folarin Latinwo, Yulu Chen, Delian Yang, Rob DeLancey, Owen Huang, Kevin Lucas
Proceedings Volume 11613, 116130F (2021) https://doi.org/10.1117/12.2584781
KEYWORDS: Photoresist materials, Photoresist developing, Optical proximity correction, Optical lithography, Semiconductors, Polymers, Physics, Photoresist processing, Pollution control, Logic

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