Dr. Rob Snijkers Profile

Dr. Rob Snijkers

at Philips Technologie GmbH

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Publications (2)

Proceedings Article | 18 March 2009 Paper

Xenon DPP source technologies for EUVL exposure tools

Masaki Yoshioka, Denis Bolshukhin, Marc Corthout, Günther Derra, Sven Götze, Jeroen Jonkers, Jürgen Kleinschmidt, Rainer Müller, Max Schürmann, Guido Schriever, Rob Snijkers, Peter Zink

Proceedings Volume 7271, 727109 (2009) https://doi.org/10.1117/12.814100

KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Xenon, Plasma, Tin, Integrated optics, Scanners, Curtains, Electrodes, Reliability

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Proceedings Article | 27 March 2008 Paper

Sn DPP source-collector modules: status of alpha resources, beta developments, and the scalability to HVM

Marc Corthout, Rolf Apetz, Jesko Brudermann, Marcel Damen, Günther Derra, Oliver Franken, Jeroen Jonkers, Jürgen Klein, Felix Küpper, Arnaud Mader, Willi Neff, Hans Scheuermann, Guido Schriever, Max Schürmann, Guido Seimons, Rob Snijkers, Dominik Vaudrevange, Erik Wagenaars, Peiter van de Wel, Masaki Yoshioka, Peter Zink, Oliver Zitzen

Proceedings Volume 6921, 69210V (2008) https://doi.org/10.1117/12.772633

KEYWORDS: Extreme ultraviolet, Tin, Plasma, Pulsed laser operation, Extreme ultraviolet lithography, Astatine, Ultraviolet radiation, Electrodes, Capacitors, Lithography

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