Prof. Robert L. Brainard
Professor at SUNY Polytechnic
SPIE Involvement:
Conference Program Committee | Author
Publications (59)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Lithography, Deep ultraviolet, Polymers, Ions, Amplifiers, Photoresist materials, Extreme ultraviolet lithography

Proceedings Article | 24 March 2020 Presentation
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII

Proceedings Article | 8 April 2019 Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Polymers, Metals, Photoresist materials, Polymerization, Extreme ultraviolet, Extreme ultraviolet lithography, Antimony

Proceedings Article | 27 March 2019 Presentation + Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Oxides, Metals, Ions, Photoresist materials, Extreme ultraviolet, Bismuth, Extreme ultraviolet lithography, Antimony, Photoresist developing

Proceedings Article | 25 March 2019 Presentation
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Optical components, Metals, Photons, Photoresist materials, Extreme ultraviolet, Absorbance, Extreme ultraviolet lithography, Chemical elements

Showing 5 of 59 publications
Conference Committee Involvement (13)
Optical / EUV Nanolithography and Practices
27 February 2022 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography XII
22 February 2021 | Online Only, California, United States
Extreme Ultraviolet (EUV) Lithography XI
24 February 2020 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography X
25 February 2019 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography IX
26 February 2018 | San Jose, California, United States
Showing 5 of 13 Conference Committees
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