Prof. Robert Brunner Profile

Prof. Robert Brunner

Professor at Ernst-Abbe-Hochschule Jena

Area of Expertise:

microoptics , lithography , optical nanostructures , diffractive optics , spectroscopic instruments

Publications (28)

Proceedings Article | 15 June 2023 Presentation + Paper

Comparison of different methods to substantially improve the efficiency of filter-based spectroscopic sensors

A. Kobylinskiy, M. Kraus, H. Hillmer, R. Brunner

Proceedings Volume 12516, 125160J (2023) https://doi.org/10.1117/12.2663858

KEYWORDS: Optical filters, Sensors, Spectroscopy, Dichroic mirrors, Beam path, Spectral resolution, Linear filtering

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Proceedings Article | 15 June 2023 Presentation + Paper

Compact cross-grating spectrometer in double-pass configuration: design, implementation, and test

Matthias Kraus, Tobias Hönle, Erik Förster, Robert Brüning, Hartmut Hillmer, Robert Brunner

Proceedings Volume 12516, 1251607 (2023) https://doi.org/10.1117/12.2664010

KEYWORDS: Spectroscopy, Objectives, Spectral resolution, Optical design, Diffraction, Cameras, Design and modelling, Mechanical engineering, Diffraction gratings, Optical gratings

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Proceedings Article | 15 July 2022 Paper

Mesoscale surface patterning by ring-shaped lithography for single and array optical elements

M. Knoblich, M. Kraus, D. Stumpf, E. Förster, L. Werner, H. Hillmer, R. Brunner

Proceedings Volume 12298, 122980D (2022) https://doi.org/10.1117/12.2632159

KEYWORDS: Axicons, Optical components, Lithography, Light sources, Geometrical optics, Photoresist materials, Optical arrays, Aspheric lenses, Optics manufacturing

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SPIE Journal Paper | 21 September 2021 Open Access

Simple but effective: strong efficiency boost for a linear variable filter-based spectrometer

Aliaksei Kobylinskiy, Matthias Kraus, Xavier Uwurukundo, Harmut Hillmer, Robert Brunner

JOM, Vol. 1, Issue 04, 044501, (September 2021) https://doi.org/10.1117/12.10.1117/1.JOM.1.4.044501

KEYWORDS: Beam splitters, Optical filters, Lamps, Spectroscopy, Halogens, Linear filtering, Mirrors, Optical microsystems, CCD image sensors, CCD cameras

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Proceedings Article | 17 September 2019 Open Access

System calibration and characterization of an ultra-compact multispectral snapshot imaging system

M. Hubold, R. Berlich, R. Brüning, R. Brunner

Proceedings Volume 11144, 111440V (2019) https://doi.org/10.1117/12.2532317

KEYWORDS: Imaging systems, Calibration, Cameras, Multispectral imaging, Optical filters, Image fusion, Image filtering, Image sensors, Multichannel imaging systems, Channel projecting optics

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Proceedings Article | 22 February 2018 Paper

Ultra-compact micro-optical system for multispectral imaging

Martin Hubold, René Berlich, Christin Gassner, Robert Brüning, Robert Brunner

Proceedings Volume 10545, 105450V (2018) https://doi.org/10.1117/12.2295343

KEYWORDS: Imaging systems, Microlens, Optical filters, Multispectral imaging, Image sensors, Microlens array, Modulation transfer functions, Linear filtering, Spectral data processing, Spectral imaging cameras

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Proceedings Article | 20 February 2017 Paper

Automatic correction of diffraction pattern shift in a pushbroom hyperspectral imager with a piezoelectric internal line-scanning unit

Mohammad Abdo, Erik Förster, Patrick Bohnert, Moritz Stürmer, Vlad Badilita, Robert Brunner, Ulrike Wallrabe, Jan Korvink

Proceedings Volume 10110, 1011004 (2017) https://doi.org/10.1117/12.2248467

KEYWORDS: Automatic control, Imaging spectroscopy, Optical spectroscopy, Optical spectroscopy imaging, Diffraction, Hyperspectral imaging, Imaging systems, Cameras, Spectroscopy, CCD cameras, Collimation, CCD image sensors, Data acquisition

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Proceedings Article | 15 March 2016 Paper

Composite axilens-axicon diffractive optical elements for generation of ring patterns with high focal depth

Raghu Dharmavarapu, A. Vijayakumar, R. Brunner, Shanti Bhattacharya

Proceedings Volume 9753, 97531D (2016) https://doi.org/10.1117/12.2213037

KEYWORDS: Axicons, Diffractive optical elements, Composites, Electron beams, Binary data, Optical design, Diffraction, Fiber coupled lasers, Fiber couplers, Fiber lasers, Optical components

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Proceedings Article | 9 May 2012 Paper

Talbot-carpets of periodic and quasi-periodic close-packed 2D mask structures calculated by a modified chirp-z-algorithm

Jacqueline Maass, Oliver Sandfuchs, Alexandre Gatto, Daniel Thomae, Robert Brunner

Proceedings Volume 8428, 84281L (2012) https://doi.org/10.1117/12.922217

KEYWORDS: Photomasks, Wave propagation, Opacity, Computer simulations, Binary data, Applied sciences, Visible radiation, Diffraction, Numerical simulations, Optical properties

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Proceedings Article | 9 September 2010 Paper

Microstructured optics for excimer-based systems: applications for imaging, beam shaping, and coherence management

Robert Brunner, Hans Jürgen Dobschal, Reinhard Steiner, Matthias Burkhardt, Arnaud Deparnay, Oliver Sandfuchs, Dennis Lehr, Michael Helgert

Proceedings Volume 7652, 765227 (2010) https://doi.org/10.1117/12.868908

KEYWORDS: Diffraction, Imaging systems, Excimer lasers, Diffractive optical elements, Electromagnetism, Diffraction gratings, Wavefronts, Microlens, Microlens array, Superposition

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Proceedings Article | 13 May 2010 Paper

Microspectral sensors: concepts, efficiency and manufacturing

R. Brunner, M. Burkhardt, R. Steiner, O. Sandfuchs

Proceedings Volume 7716, 771611 (2010) https://doi.org/10.1117/12.858254

KEYWORDS: Spectroscopy, Diffraction, Diffraction gratings, Sensors, Manufacturing, Dielectrics, Reflectivity, Spectral resolution, Mirrors, Lithography

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Proceedings Article | 11 August 2008 Paper

Product piracy from nature: biomimetic microstructures and interfaces for high-performance optics

Robert Brunner, Arnaud Deparnay, Michael Helgert, Matthias Burkhardt, Theobald Lohmüller, Joachim Spatz

Proceedings Volume 7057, 705705 (2008) https://doi.org/10.1117/12.795939

KEYWORDS: Eye, Microlens, Microlens array, Optical components, Ocean optics, Lithography, Interfaces, Gold, Chemical elements, Diffusers

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Proceedings Article | 14 September 2007 Paper

Rigorous modeling of dielectric and metallic blaze gratings in the intermediate structure regime

Oliver Sandfuchs, Alexander Pesch, Robert Brunner

Proceedings Volume 6675, 66750I (2007) https://doi.org/10.1117/12.731997

KEYWORDS: Diffraction gratings, Dielectrics, Metals, Diffraction, Electromagnetism, Systems modeling, Reflectivity, Refractive index, Imaging systems, Performance modeling

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SPIE Journal Paper | 1 October 2005

MOEMS-based lithography for the fabrication of micro-optical components

Lars Erdmann, Arnaud Deparnay, Gunter Maschke, Mario Längle, Robert Brunner

JM3, Vol. 4, Issue 04, 041601, (October 2005) https://doi.org/10.1117/12.10.1117/1.2114647

KEYWORDS: Lithography, Digital micromirror devices, Photomasks, Microlens array, Photoresist materials, Objectives, Computer generated holography, Micromirrors, Lenses, Optical components

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Proceedings Article | 16 June 2005 Paper

Application results at 193nm: lithography emulation by aerial imaging and supplementary high resolution measurements

Axel Zibold, Rainer Schmid, Klaus Bohm, Robert Brunner, Arndt Durr

Proceedings Volume 5835, (2005) https://doi.org/10.1117/12.637309

KEYWORDS: Photomasks, Image resolution, Semiconducting wafers, Lithography, Reticles, Binary data, Optical proximity correction, 193nm lithography, Airborne remote sensing, Scanners

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Proceedings Article | 6 December 2004 Paper

Immersion mask inspection with hybrid-microscopic systems at 193 nm

Robert Brunner, Alexander Menck, Reinhard Steiner, Gerd Buchda, Steffen Weissenberg, Uwe Horn, Axel Zibold

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.569019

KEYWORDS: Photomasks, Objectives, Microscopes, Image resolution, Solids, Diffractive optical elements, Imaging systems, Silica, Refractive index, Inspection

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Proceedings Article | 29 July 2004 Paper

Subwavelength-resolution fluorescent correlation spectroscopy using a solid immersion lens

Alexandre Serov, Ramachandra Rao, Michael Gosch, Tiemo Anhut, Dietrich Martin, Robert Brunner, Rudolf Rigler, Theo Lasser

Proceedings Volume 5486, (2004) https://doi.org/10.1117/12.572046

KEYWORDS: Molecules, Objectives, Fluorescence correlation spectroscopy, Solids, Microscopes, Diffusion, Confocal microscopy, Spectroscopy, Luminescence, Chemical elements

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Proceedings Article | 2 June 2004 Paper

Aerial image measurement technique for today's and future 193-nm lithography mask requirements

Axel Zibold, Thomas Scheruebl, Alexander Menck, Robert Brunner, J. Greif

Proceedings Volume 5504, (2004) https://doi.org/10.1117/12.568016

KEYWORDS: Photomasks, Lithography, Image resolution, Objectives, 193nm lithography, Lithographic illumination, Beam homogenizers, Polarization, Reticles, Semiconducting wafers

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Proceedings Article | 24 May 2004 Paper

Aerial image measurement technique for fast evaluation of 193-nm lithography masks

Axel Zibold, Thomas Scheruebl, Wolfgang Harnisch, Robert Brunner, J. Greif

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533021

KEYWORDS: Photomasks, Semiconducting wafers, Lithography, Scanners, Reticles, Polarization, Phase shifts, Beam homogenizers, Lithographic illumination, Homogenization

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Proceedings Article | 29 December 2003 Paper

MEMS-based lithography for the fabrication of micro-optical components

Lars Erdmann, Arnaud Deparnay, Falk Wirth, Robert Brunner

Proceedings Volume 5347, (2003) https://doi.org/10.1117/12.524447

KEYWORDS: Lithography, Computer generated holography, Digital micromirror devices, Photomasks, Photoresist materials, Microelectromechanical systems, Objectives, Micromirrors, Optical components, Rapid manufacturing

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Proceedings Article | 10 November 2003 Paper

Diffractive-refractive hybrid microscope objective for 193-nm inspection systems

Robert Brunner, Reinhard Steiner, Klaus Rudolf, Hans-Juergen Dobschal

Proceedings Volume 5177, (2003) https://doi.org/10.1117/12.498325

KEYWORDS: Objectives, Diffractive optical elements, Microscopes, Photomasks, Diffraction, Chemical elements, Inspection, Holography, Optical components, Lens design

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Proceedings Article | 3 November 2003 Paper

New solutions to realize complex optical systems by a combination of diffractive and refractive optical components

Robert Brunner, Reinhard Steiner, Hans-Juergen Dobschal, Dietrich Martin, Matthias Burkhardt, Michael Helgert

Proceedings Volume 5183, (2003) https://doi.org/10.1117/12.509459

KEYWORDS: Deep ultraviolet, Imaging systems, Optical components, Diffractive optical elements, Holography, Lens design, Objectives, Chemical elements, Lithography, Spatial frequencies

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Proceedings Article | 2 June 2003 Paper

Microscope illumination systems for 157 nm

Alexander Pesch, Kristina Uhlendorf, Arnaud Deparnay, Lars Erdmann, Peter Kuschnerus, Thomas Engel, Robert Brunner

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.483464

KEYWORDS: Diffusers, Microscopes, Excimer lasers, Microlens array, Temporal coherence, Microlens, Optical lithography, Pulsed laser operation, Inspection, Speckle

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Proceedings Article | 30 May 2003 Paper

A look into life sciences: more than a side step from industrial inspection?

Theo Lasser, Tiemo Anhut, Alexandre Serov, Kai Hassler, Ramachandra Rao, Marcel Leutenegger, Adrian von Muehlenen, Rodrigue Chatton, Patrik Hoffmann, Ivo Utke, Radivoje Popovic, Pierre-Andre Besse, Alexis Rochas, Michael Gosch, Rudolf Rigler, Robert Brunner

Proceedings Volume 5144, (2003) https://doi.org/10.1117/12.508363

KEYWORDS: Fluorescence correlation spectroscopy, Molecules, Luminescence, Molecular spectroscopy, Inspection, Fluorescence spectroscopy, Molecular energy transfer, Confocal microscopy, Life sciences, Diffusion

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Proceedings Article | 16 August 2002 Paper

Coherence management for microlens laser beam homogenizers

Lars Erdmann, Matthias Burkhardt, Robert Brunner

Proceedings Volume 4775, (2002) https://doi.org/10.1117/12.479646

KEYWORDS: Microlens, Mirrors, Diffraction, Spatial coherence, Temporal coherence, Microlens array, Diffraction gratings, Speckle, Excimer lasers, Deep ultraviolet

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Proceedings Article | 10 December 2001 Paper

Diffractive solid immersion lenses: characterization and manufacturing

Robert Brunner, Joerg Bischoff, Klaus Rudolf, Margit Ferstl

Proceedings Volume 4449, (2001) https://doi.org/10.1117/12.450099

KEYWORDS: Solids, Binary data, Holography, Lenses, Glasses, Reactive ion etching, Chromium, Manufacturing, Chemical elements, Etching

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Proceedings Article | 22 August 2001 Paper

Light-diffraction-based overlay measurement

Joerg Bischoff, Robert Brunner, Joachim Bauer, Ulrich Haak

Proceedings Volume 4344, (2001) https://doi.org/10.1117/12.436745

KEYWORDS: Overlay metrology, Diffraction, Diffraction gratings, Optical alignment, Semiconducting wafers, Optical lithography, Optical testing, Photomasks, Optical design, Photomicroscopy

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Proceedings Article | 2 November 2000 Paper

Numerical investigation of the resolution in solid immersion lens systems

Joerg Bischoff, Robert Brunner

Proceedings Volume 4099, (2000) https://doi.org/10.1117/12.405824

KEYWORDS: Chromium, Solids, Dielectrics, Diffraction, Modulation, Microscopy, Refractive index, Data storage, Electromagnetism, Sensors

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Showing 5 of 28 publications

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