Dr. Robert E. Geer Profile

Dr. Robert E. Geer

at SUNY/Univ at Albany

SPIE Involvement:

Author

Proceedings Article | 20 October 2006 Paper

Interaction forces on mask surfaces relevant to EUV lithography

R. Hübner, S. Eichenlaub, A. Rastegar, R. Geer

Proc. SPIE. 6349, Photomask Technology 2006

KEYWORDS: Quartz, Photomasks, Particles, Optical spheres, Extreme ultraviolet lithography, Chromium, Chemistry, Surface roughness, Atomic force microscopy, Mask cleaning

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SPIE Journal Paper | 1 April 2006

Integrated cantilever development for ultrasonic and acoustic scanning probe microscopy

Stephen Olson, Balasubramanian Sankaran, Bruce Altemus, Robert Geer, James Castracane, Bai Xu

JM3 Vol. 5 Issue 02

KEYWORDS: Zinc oxide, Actuators, Semiconducting wafers, Ultrasonics, Scanning probe microscopy, Etching, Electrodes, Oxides, Imaging systems, Silicon

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Proceedings Article | 9 May 2005 Paper

Integrated cantilever fabrication and system development for ultrasonic and acoustic scanning probe microscopy

Stephen Olson, Balasubramanian Sankaran, Bruce Altemus, Bai Xu, Robert Geer

Proc. SPIE. 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III

KEYWORDS: Zinc oxide, Etching, Actuators, Semiconducting wafers, Ultrasonics, Electrodes, Silicon, Metals, Photomasks, Scanning probe microscopy

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Proceedings Article | 9 May 2005 Paper

Near-field nano-Raman imaging of Si device structures

Jacob Atesang, Robert Geer

Proc. SPIE. 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III

KEYWORDS: Silicon, Near field, Raman spectroscopy, Near field scanning optical microscopy, Raman scattering, Silver, Metrology, Photons, Imaging devices, Spatial resolution

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Proceedings Article | 9 May 2005 Paper

Nondestructive mechanical imaging of carbon nanotubes

Yuegui Zheng, Balasubramanian Sankaran, Robert Geer

Proc. SPIE. 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III

KEYWORDS: Silicon, Ultrasonics, Chemical vapor deposition, Transmission electron microscopy, Carbon nanotubes, Modulation, Microscopy, Calibration, Scanning probe microscopy, Nondestructive evaluation

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Proceedings Article | 22 January 2005 Paper

Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators

Steve Olson, Bruce Altemus, Balasubramanian Sankaran, Natalya Tokranova, Robert Geer, James Castracane, Bai Xu

Proc. SPIE. 5717, MEMS/MOEMS Components and Their Applications II

KEYWORDS: Silicon, Semiconducting wafers, Atomic force microscopy, Boron, Actuators, Metals, Etching, Oxides, Resistance, Finite element methods

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Proceedings Article | 21 July 2004 Paper

Nondestructive mechanical imaging of SnO2 nanobelts

Yuegui Zheng, Robert Geer

Proc. SPIE. 5392, Testing, Reliability, and Application of Micro- and Nano-Material Systems II

KEYWORDS: Silicon, Crystals, Ultrasonics, Calibration, Adhesives, Diffraction, Nondestructive evaluation, Transmission electron microscopy, Atomic force microscopy, Spectroscopy

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Proceedings Article | 22 July 2003 Paper

Nondestructive nanomechanical imaging: cross-sectional ultrasonic force microscopy of integrated circuit test structures

L. Muthuswami, Y. Zheng, Robert Geer

Proc. SPIE. 5045, Testing, Reliability, and Application of Micro- and Nano-Material Systems

KEYWORDS: Silicon, Ultrasonics, Dielectrics, Plasma enhanced chemical vapor deposition, Microscopy, Interfaces, Integrated circuits, Modulation, Ultrasonography, Polishing

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Proceedings Article | 29 April 2003 Paper

Micro-deformation measurement using focused ion beam moire method

Huimin Xie, Biao Li, Robert Geer, Bai Xu, James Castracane, Fulong Dai

Proc. SPIE. 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002

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Proceedings Article | 2 October 2001 Paper

Nanoscale elastic imaging of micro-electro-mechanical system based micromirrors

Bruce Altemus, Gajendra Shekhawat, Bai Xu, Robert Geer, James Castracane

Proc. SPIE. 4558, Reliability, Testing, and Characterization of MEMS/MOEMS

KEYWORDS: Micromirrors, Mirrors, Atomic force microscopy, Ultrasonics, Switching, Reliability, Imaging systems, Microelectromechanical systems, Gold, Electrodes

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Proceedings Article | 15 June 2001 Paper

Remote vapor phase processing of organic semiconductors for optoelectronic applications

Sumant Padiyar, Li Chen, Harry Efsthadiatis, Robert Geer

Proc. SPIE. 4279, Organic Photonic Materials and Devices III

KEYWORDS: Organic vapor phase deposition, Surface roughness, Aluminum, Diffractive optical elements, Organic semiconductors, Deposition processes, Crystals, Microsystems, Semiconducting wafers, Organic light emitting diodes

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Proceedings Article | 25 August 2000 Paper

Process development and fabrication of application-specific microvalves

Bai Xu, James Castracane, Robert Geer, Yahong Yao, Bruce Altemus

Proc. SPIE. 4174, Micromachining and Microfabrication Process Technology VI

KEYWORDS: Aluminum, Semiconducting wafers, Silicon, Etching, Sputter deposition, Actuators, Deposition processes, Metals, Oxides, Scanning electron microscopy

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Proceedings Article | 26 March 1999 Paper

Postprocessing sequence for liquid-crystal-on-silicon microdisplays

Anno Hermanns, Loretta Shirey, Robert Geer, Michael Radler, Zailong Bian, Banahalli Ratna

Proc. SPIE. 3635, Liquid Crystal Materials, Devices, and Applications VII

KEYWORDS: Aluminum, Electrodes, Polymers, Silicon, Etching, Semiconducting wafers, Photomasks, Reactive ion etching, Chemical mechanical planarization, Photoresist materials

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Proceedings Article | 11 April 1997 Paper

Development of liquid crystalline materials for IR sensing

Karl Crandall, S. Taylor, U. Kakarla, Jawad Naciri, Ranganathan Shashidhar, Robert Geer

Proc. SPIE. 3015, Liquid Crystal Materials, Devices, and Applications V

KEYWORDS: Sensors, Liquid crystals, Staring arrays, Temperature metrology, Crystals, Polarization, Dielectric polarization, Dielectrics, Liquids, Pyroelectric liquid crystals

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Showing 5 of 14 publications

SPIE Conference Volume | 16 March 2006

Testing, Reliability, and Application of Micro- and Nano-Material Systems IV

SPIE Conference Volume | 9 May 2005

Testing, Reliability, and Application of Micro- and Nano-Material Systems III

Conference Committee Involvement (3)

Testing, Reliability, and Application of Micro- and Nano-Material Systems IV

1 March 2006 | San Diego, CA, United States

Testing, Reliability, and Application of Micro- and Nano-Material Systems III

9 March 2005 | San Diego, CA, United States

Testing, Reliability, and Application of Micro-and Nano-Material Systems II

15 March 2004 | San Diego, CA, United States

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