Dr. Robert E. Geer
at SUNY/Univ at Albany
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Quartz, Photomasks, Particles, Optical spheres, Extreme ultraviolet lithography, Chromium, Chemistry, Surface roughness, Atomic force microscopy, Mask cleaning

SPIE Journal Paper | 1 April 2006
JM3 Vol. 5 Issue 02
KEYWORDS: Zinc oxide, Actuators, Semiconducting wafers, Ultrasonics, Scanning probe microscopy, Etching, Electrodes, Oxides, Imaging systems, Silicon

Proceedings Article | 9 May 2005 Paper
Proc. SPIE. 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III
KEYWORDS: Zinc oxide, Etching, Actuators, Semiconducting wafers, Ultrasonics, Electrodes, Silicon, Metals, Photomasks, Scanning probe microscopy

Proceedings Article | 9 May 2005 Paper
Proc. SPIE. 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III
KEYWORDS: Silicon, Near field, Raman spectroscopy, Near field scanning optical microscopy, Raman scattering, Silver, Metrology, Photons, Imaging devices, Spatial resolution

Proceedings Article | 9 May 2005 Paper
Proc. SPIE. 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III
KEYWORDS: Silicon, Ultrasonics, Chemical vapor deposition, Transmission electron microscopy, Carbon nanotubes, Modulation, Microscopy, Calibration, Scanning probe microscopy, Nondestructive evaluation

Showing 5 of 14 publications
Proceedings Volume Editor (2)

Conference Committee Involvement (3)
Testing, Reliability, and Application of Micro- and Nano-Material Systems IV
1 March 2006 | San Diego, CA, United States
Testing, Reliability, and Application of Micro- and Nano-Material Systems III
9 March 2005 | San Diego, CA, United States
Testing, Reliability, and Application of Micro-and Nano-Material Systems II
15 March 2004 | San Diego, CA, United States
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