Mr. Robin C. Sarma Profile

Robin C. Sarma

Senior Product Engineer at Cadence Design Systems Inc

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Publications (3)

Proceedings Article | 6 December 2004 Paper

Accelerating yield ramp through design and manufacturing collaboration

Robin Sarma, Huixiong Dai, Michael Smayling, Michael Duane

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.572591

KEYWORDS: Photomasks, Semiconducting wafers, Manufacturing, Design for manufacturability, Reticles, Vestigial sideband modulation, Diagnostics, Failure analysis, Optical proximity correction, Resolution enhancement technologies

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Proceedings Article | 3 May 2004 Paper

Manufacturability of the X Architecture at the 90-nm technology node

Michael Smayling, Robin Sarma, Toshiyuki Nagata, Narain Arora, Michael Duane, Shiany Oemardani, Santosh Shah

Proceedings Volume 5379, (2004) https://doi.org/10.1117/12.536027

KEYWORDS: Optical proximity correction, Resistance, Manufacturing, Semiconducting wafers, Resistors, Metals, Lithography, Scanners, Metrology, Photomasks

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Proceedings Article | 3 May 2004 Paper

Taking the X Architecture to the 65-nm technology node

Robin Sarma, Michael Smayling, Narain Arora, Toshiyuki Nagata, Michael Duane, Santosh Shah, Harris Keston, Shiany Oemardani

Proceedings Volume 5379, (2004) https://doi.org/10.1117/12.536130

KEYWORDS: Photomasks, Manufacturing, Metals, Semiconducting wafers, Critical dimension metrology, Optical proximity correction, Resistance, Lithography, Dielectrics, Copper

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