Dr. Rodrigue Rousier
at CEA-LETI
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 January 2006 Paper
R. Rousier, C. Divoux, H. Grange, J. Charton, M. H. Vaudaine, L. Jocou, N. Raphoz, M. Trzmiel, C. Pisella, C. Chappaz
Proceedings Volume 6114, 61140K (2006) https://doi.org/10.1117/12.651659
KEYWORDS: Actuators, Mirrors, Silicon, Electrodes, Deformable mirrors, Dielectrics, Semiconducting wafers, Etching, Wavefronts, Optical lithography

Proceedings Article | 23 October 2001 Paper
Proceedings Volume 4400, (2001) https://doi.org/10.1117/12.445591
KEYWORDS: Heterodyning, Silicon, Near field optics, Laser beam diagnostics, Interferometers, Microelectromechanical systems, Near field, Microresonators, Optical spheres, Microscopes

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