Dr. Rodrigue Rousier
at CEA-LETI
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 January 2006 Paper
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Actuators, Mirrors, Optical lithography, Etching, Electrodes, Dielectrics, Silicon, Wavefronts, Deformable mirrors, Semiconducting wafers

Proceedings Article | 23 October 2001 Paper
Proc. SPIE. 4400, Microsystems Engineering: Metrology and Inspection
KEYWORDS: Microelectromechanical systems, Microscopes, Microresonators, Optical spheres, Interferometers, Silicon, Near field, Heterodyning, Laser beam diagnostics, Near field optics

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