Mr. Rohith Acharya Profile

Rohith Acharya

at imec

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Publications (1)

Proceedings Article | 30 April 2023 Presentation

Foundry compatible 300 mm process flows for Si spin and superconducting qubits

Danny Wan, Stefan Kubicek, Tsvetan Ivanov, Shana Massar, Massimo Mongillo, Anton Potocnik, Ruoyu Li, Clement Godfrin, Daniel Perez Lozano, Xiaoyu Piao, Julien Jussot, Yann Canvel, Antoine Pacco, Andriy Hikavyy, Henri Jansen, Asser Elsayed, Mohamed Shehata, Jeroen Verjauw, Rohith Acharya, Jacques Van Damme, George Simion, Kristiaan De Greve

Proceedings Volume PC12499, PC1249908 (2023) https://doi.org/10.1117/12.2662652

KEYWORDS: Quantum communications, Superconductors, Silicon, Quantum computing, Transistors, Optical lithography, Interfaces, Etching, Electron transport

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