Dr. Roland Fuessl Profile

Dr. Roland Fuessl

at Technische Univ Ilmenau

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Author

Publications (9)

Proceedings Article | 23 March 2020 Paper

Tip- and laser-based nanofabrication up to 100 mm with sub-nanometre precision

Ingo Ortlepp, Michael Kühnel, Martin Hofmann, Laura Weidenfeller, Johannes Kirchner, Shraddha Supreeti, Rostyslav Mastylo, Mathias Holz, Thomas Michels, Roland Füßl, Ivo Rangelow, Thomas Fröhlich, Denis Dontsov, Christoph Schäffel, Eberhard Manske

Proceedings Volume 11324, 113240A (2020) https://doi.org/10.1117/12.2551044

KEYWORDS: Interferometers, Nanofabrication, Mirrors, Actuators, Near field optics, Control systems, Manufacturing, Nanotechnology, Physics, Atomic force microscopy

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Proceedings Article | 21 June 2019 Presentation + Paper

Scale spanning subnanometer metrology up to ten decades

Eberhard Manske, Thomas Fröhlich, Roland Füßl, Rostyslav Mastylo, Ulrike Blumröder, Paul Köchert, Oliver Birli, Ingo Ortlepp, Christof Pruß, Folker Schwesinger, Andreas Meister

Proceedings Volume 11056, 110560L (2019) https://doi.org/10.1117/12.2526076

KEYWORDS: Metrology, Interferometers, Frequency combs, Helium neon lasers, Mirrors, Precision measurement, Sensors, Laser metrology, Sensor technology, Optics manufacturing

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Proceedings Article | 19 March 2018 Presentation + Paper

Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions

Ivo Rangelow, Claudia Lenk , Martin Hofmann , Steve Lenk , Tzvetan Ivanov , Ahmad Ahmad , Marcus Kaestner, Elshad Guliyev, Christoph Reuter, Matthias Budden, Jens-Peter Zöllner, Mathias Holz , Alexander Reum, Zahid Durrani, Mervyn Jones, Cemal Aydogan, Mahmut Bicer, B. Erdem Alaca, Michael Kuehnel, Thomas Fröhlich, Roland Fuessl, E. Manske

Proceedings Volume 10584, 1058406 (2018) https://doi.org/10.1117/12.2299955

KEYWORDS: Silicon, Lithography, Etching, Scanning probe lithography, Cryogenics, Optical alignment, Nanoelectronics, Reactive ion etching, Nanolithography, Electron beam lithography

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Proceedings Article | 26 March 2013 Paper

0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography

Nataliya Vorbringer-Doroshovets, Felix Balzer, Roland Fuessl, Eberhard Manske, Marcus Kaestner, Andreas Schuh, Jens-Peter Zoellner, Manuel Hofer, Elshad Guliyev, Ahmad Ahmad, Tzvetan Ivanov , Ivo Rangelow

Proceedings Volume 8680, 868018 (2013) https://doi.org/10.1117/12.2012324

KEYWORDS: Scanning probe lithography, Lithography, Atomic force microscopy, Nanoelectronics, Optical lithography, Silicon, Inspection, Scanners, Optical alignment, Photomasks

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Proceedings Article | 22 May 2009 Paper

Monte Carlo simulation to determine the measurement uncertainty of a metrological scanning probe microscope measurement

Ph. Kreutzer, N. Dorozhovets, E. Manske, R. Füßl, G. Jäger, R. Grünwald

Proceedings Volume 7378, 737816 (2009) https://doi.org/10.1117/12.821794

KEYWORDS: Metrology, Interferometers, Scanning probe microscopy, Monte Carlo methods, Beam splitters, Mirrors, Scanning probe microscopes, Distance measurement, Thermal modeling, Calibration

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Proceedings Article | 11 August 2008 Paper

Uncertainty consideration of the mirror-interferometer system in nanopositioning and nanomeasuring machines

R. Füßl, R. Grünwald, Ph. Kreutzer

Proceedings Volume 7064, 70640L (2008) https://doi.org/10.1117/12.797058

KEYWORDS: Interferometers, 3D modeling, Mirrors, Metrology, Time metrology, Analytical research, Mirror pointing, Protactinium, Sensors, Lead

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Proceedings Article | 14 August 2006 Paper

A new traceable method for determination of periodic nonlinearities of interferometers

I. Schmidt, G. Jäger, T. Hausotte, E. Manske, R. Füßl

Proceedings Volume 6292, 629206 (2006) https://doi.org/10.1117/12.680613

KEYWORDS: Interferometers, Mirrors, Motion measurement, Calibration, Demodulation, Control systems, Sensors, Motion analysis, Laser stabilization, Time metrology

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Proceedings Article | 14 February 2005 Paper

Integration of probe systems in a nanopositioning and nanomeasuring machine

Gerd Jaeger, Eberhard Manske, Tino Hausotte, Rostyslav Mastylo, Hans-Joachim Buechner, Rainer Gruenwald, Roland Fussl

Proceedings Volume 5776, (2005) https://doi.org/10.1117/12.611848

KEYWORDS: Sensors, Mirrors, Interferometers, System integration, Sensor technology, Calibration, Scanning probe microscopy, Photomasks, Wafer inspection, Metrology

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Proceedings Article | 20 November 2003 Paper

Miniature interferometers for applications in microtechnology and nanotechnology

Gerd Jager, Eberhard Manske, Tino Hausotte, Roland Fußl, Rainer Grunwald, Hans Buchner, Walter Schott, Denys Dontsov

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.507906

KEYWORDS: Interferometers, Retroreflectors, Sensors, Microscopes, Metrology, Microtechnology, Nanotechnology, Interferometry, Fiber optics, Waveguides

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Showing 5 of 9 publications

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