Ron R. Legario
at Quantiscript Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Etching, Nickel, Photomasks, Mask making, Plating, Reactive ion etching, Charged-particle lithography

Proceedings Article | 14 May 2004 Paper
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Etching, Silicon, Coating, Semiconductor lasers, Photomasks, Zone plates, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top