Prof. Ronald Albert Lawes
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 2 April 2004 Paper
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Polymethylmethacrylate, Glasses, Photons, X-rays, Photomasks, Synchrotrons, Helium, Beryllium, Semiconducting wafers, Absorption

Proceedings Article | 19 November 2001 Paper
Proc. SPIE. 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II
KEYWORDS: Gold, Polymethylmethacrylate, X-rays, Nickel, Manufacturing, Photomasks, Synchrotrons, Beryllium, Photoresist processing, Semiconducting wafers

Proceedings Article | 7 June 1996 Paper
Proc. SPIE. 2726, Optical Microlithography IX
KEYWORDS: Optical lithography, Polymethylmethacrylate, Deep ultraviolet, Silica, Imaging systems, Laser development, Photoresist materials, Excimer lasers, Semiconducting wafers, Combined lens-mirror systems

Proceedings Article | 1 April 1992 Paper
Proc. SPIE. 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level
KEYWORDS: Deep ultraviolet, Lenses, Polymers, Laser processing, Manufacturing, Laser development, Lens design, Laser ablation, Excimer lasers, Pulsed laser operation

Proceedings Volume Editor (1)

SPIE Conference Volume | 21 March 2001

Conference Committee Involvement (8)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
10 December 2008 | Melbourne, Australia
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
5 December 2007 | Canberra, ACT, Australia
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
11 December 2006 | Adelaide, Australia
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
12 December 2005 | Brisbane, Australia
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
13 December 2004 | Sydney, Australia
Showing 5 of 8 Conference Committees
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