Mr. Ronan Barry Profile

Ronan Barry

at Analog Devices

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Publications (2)

Proceedings Article | 1 July 2003 Paper

Neural-network-based run-to-run controller using exposure and resist thickness adjustment

Shane Geary, Ronan Barry

Proceedings Volume 5044, (2003) https://doi.org/10.1117/12.485298

KEYWORDS: Critical dimension metrology, Neural networks, Feedback control, Evolutionary algorithms, Device simulation, Computer simulations, Process control, Control systems, Manufacturing, Algorithm development

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Proceedings Article | 2 June 2003 Paper

Evaluation of i-line Nikon Stepper leveling methods for improved CD control

Ronan Barry, James Thompson

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.483536

KEYWORDS: Semiconducting wafers, Sensors, Critical dimension metrology, Diffraction, Metals, Oxides, Wafer testing, CCD cameras, Photomasks, Analog electronics

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