Dr. Ruimeng Zhang
at Brewer Science Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 124980N (2023) https://doi.org/10.1117/12.2658529
KEYWORDS: Semiconducting wafers, Extreme ultraviolet lithography, Coating, Coating thickness, Silicon, Photoresist materials, Adhesion, Line width roughness, Resistance, Adhesives

Proceedings Article | 25 May 2022 Presentation + Paper
Proceedings Volume 12055, 120550A (2022) https://doi.org/10.1117/12.2610985
KEYWORDS: Extreme ultraviolet lithography, Adhesives, Polymers, Etching, Plasma etching, Optical lithography, Semiconducting wafers

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