Dr. Ruzhi M. Zhang
Senior Research Scientist at EMD Performance Materials Corp
SPIE Involvement:
Publications (6)

Proceedings Article | 20 March 2012 Paper
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Lithography, Polymers, Image processing, Dielectrics, Coating, Photoresist materials, Semiconductor manufacturing, Critical dimension metrology, Semiconducting wafers, Photoresist developing

Proceedings Article | 16 April 2011 Paper
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Semiconductors, Lithography, Polymers, Annealing, Dielectrics, Coating, Manufacturing, Fourier transforms, Head-mounted displays, Semiconducting wafers

Proceedings Article | 1 April 2009 Paper
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Polymers, Silicon, Coating, Chemistry, Manufacturing, Inspection, Fourier transforms, Photoresist materials, Semiconducting wafers, Defect inspection

Proceedings Article | 4 December 2008 Paper
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Etching, Polymers, Silicon, Coating, Reflectivity, Fourier transforms, Photoresist materials, Immersion lithography, Semiconducting wafers

Proceedings Article | 15 April 2008 Paper
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Carbon, Lithography, Etching, Silicon, Fourier transforms, Oxygen, Photoresist materials, Photomasks, Reactive ion etching, Semiconducting wafers

Showing 5 of 6 publications
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