Prof. Ryokou Kato Profile

Prof. Ryokou Kato

at High Energy Accelerator Research Organization KEK

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Publications (1)

Proceedings Article | 30 September 2021 Presentation

Demonstration of proof of concept of the EUV-FEL for future lithography

Norio Nakamura, Ryokou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yasunori Tanimoto, Yosuke Honda, Tsukasa Miyajima, Miho Shimada, Takashi Obina, Hiroshi Kawata

Proceedings Volume 11854, 118540M (2021) https://doi.org/10.1117/12.2600782

KEYWORDS: Free electron lasers, Lithography, Light sources, Extreme ultraviolet, Optical simulations, Laser development, Extreme ultraviolet lithography, Continuous wave operation, Stochastic processes, Scanners

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