Dr. Ryoung-Han R. Kim
at imec
SPIE Involvement:
Conference Co-Chair | Editorial Board Member: Journal of Micro/Nanolithography, MEMS, and MOEMS | Editorial Board Member: Journal of Micro/Nanopatterning, Materials, and Metrology | Editor | Author
Publications (64)

Proceedings Article | 25 March 2020 Presentation
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Image processing, Computer programming, Photomasks, Machine learning, Optical proximity correction, Analytical research, Vector spaces, Semiconducting wafers, Stochastic processes, Defect inspection

Proceedings Article | 26 September 2019 Presentation + Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Nanotechnology, Two photon polymerization, Metals, Adaptive optics, Optical proximity correction, Mask making, Nanofabrication, Electronic design automation, Standards development, Vestigial sideband modulation

Proceedings Article | 29 August 2019 Paper
Proc. SPIE. 11177, 35th European Mask and Lithography Conference (EMLC 2019)
KEYWORDS: Logic, Manufacturing, Inspection, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 4 June 2019 Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Lithography, Logic, Optical lithography, Metals, Printing, Bridges, Extreme ultraviolet, Transistors, Semiconducting wafers, Stochastic processes

Showing 5 of 64 publications
Proceedings Volume Editor (1)

Conference Committee Involvement (4)
Design-Technology Co-optimization XV
22 February 2021 | Online Only, California, United States
Design-Process-Technology Co-optimization for Manufacturability XIV
26 February 2020 | San Jose, California, United States
Design-Process-Technology Co-optimization for Manufacturability XIII
27 February 2019 | San Jose, California, United States
Design-Process-Technology Co-optimization for Manufacturability XII
28 February 2018 | San Jose, California, United States
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