Dr. Ryukou Kato Profile

Dr. Ryukou Kato

at High Energy Accelerator Research Organization KEK

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Author

Publications (8)

SPIE Journal Paper | 25 June 2022 Open Access

High power light source for future extreme ultraviolet lithography based on energy-recovery linac free-electron laser

Hiroshi Kawata, Norio Nakamura, Hiroshi Sakai, Ryukou Kato, Ryoichi Hajima

JM3, Vol. 21, Issue 02, 021210, (June 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021210

KEYWORDS: Free electron lasers, Light sources, Extreme ultraviolet lithography, Extreme ultraviolet, Electron beams, Mirrors, Scanners, Tin, Magnetism, Niobium

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Proceedings Article | 13 June 2022 Poster + Presentation

Construction and commissioning of cERL IR-FEL for realizing the EUV-FEL for future lithography

Norio Nakamura, Ryukou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yasunori Tanimoto, Yosuke Honda, Tsukasa Miyajima, Miho Shimada, Takashi Obina, Hiroshi Kawata

Proceedings Volume PC12051, PC120510S (2022) https://doi.org/10.1117/12.2613617

KEYWORDS: Lithography, Free electron lasers, Extreme ultraviolet, Stochastic processes, Physics, Optical resonators, Machine learning, Light sources, Laser development, Infrared radiation

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Proceedings Article | 20 September 2020 Presentation

Achievement of an important milestone to realize the EUV-FEL high power light source for future lithograph

Ryukou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yasunori Tanimoto, Yosuke Honda, Tsukasa Miyajima, Miho Shimada, Norio Nakamura, Hiroshi Kawata

Proceedings Volume 11517, 115170R (2020) https://doi.org/10.1117/12.2573121

KEYWORDS: Light sources, Free electron lasers, Extreme ultraviolet lithography, Mid-IR, Photomask technology, Extreme ultraviolet, Stochastic processes, Electron beams, Mirrors, Magnetism

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Proceedings Article | 12 October 2018 Presentation

Upgrade plan of cERL for the POC as a first stage of the development on EUV-FEL high power light source (Conference Presentation)

Hiroshi Kawata, Norio Nakamura, Ryukou Kato

Proceedings Volume 10809, 1080908 (2018) https://doi.org/10.1117/12.2501649

KEYWORDS: Light sources, Free electron lasers, Electron beams, Extreme ultraviolet, Stochastic processes, Extreme ultraviolet lithography, Laser scanners, 3D scanning, Near infrared

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Proceedings Article | 16 October 2017 Presentation

Challenges to realize the EUV-FEL high-power light source for HVM system (Conference Presentation)

Hiroshi Kawata, Norio Nakamura, Eiji Kako, Ryukou Kato, Tsukasa Miyajima

Proceedings Volume 10450, 1045010 (2017) https://doi.org/10.1117/12.2280507

KEYWORDS: Light sources, Free electron lasers, Extreme ultraviolet, Semiconductors, Superconductors, EUV optics, Extreme ultraviolet lithography

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Proceedings Article | 29 April 2016 Paper

Externally triggered imaging technique for microbolometer-type terahertz imager

Naoki Oda, Takayuki Sudou, Tsutomu Ishi, Syuichi Okubo, Goro Isoyama, Akinori Irizawa, Keigo Kawase, Ryukou Kato

Proceedings Volume 9856, 98560I (2016) https://doi.org/10.1117/12.2222292

KEYWORDS: Imaging systems, Terahertz radiation, Profiling, Free electron lasers, Pulse generators, Beam splitters, Staring arrays, Mirrors, L band, Scientific research

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Proceedings Article | 13 May 2015 Paper

Performances of THz cameras with enhanced sensitivity in sub-terahertz region

Naoki Oda, Tsutomu Ishi, Seiji Kurashina, Takayuki Sudou, Takao Morimoto, Masaru Miyoshi, Kohei Doi, Hideki Goto, Tokuhito Sasaki, Goro Isoyama, Ryukou Kato, Akinori Irizawa, Keigo Kawase

Proceedings Volume 9483, 94830S (2015) https://doi.org/10.1117/12.2175478

KEYWORDS: Terahertz radiation, Imaging systems, Cameras, Readout integrated circuits, Free electron lasers, Power meters, Mirrors, Quantum cascade lasers, Staring arrays, Electromagnetic radiation

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Proceedings Article | 21 May 2014 Paper

Image reconstruction method for non-synchronous THz signals

Naoki Oda, Syuichi Okubo, Takayuki Sudou, Goro Isoyama, Ryukou Kato, Akinori Irizawa, Keigo Kawase

Proceedings Volume 9102, 910202 (2014) https://doi.org/10.1117/12.2049305

KEYWORDS: Terahertz radiation, Imaging systems, Image restoration, Quantum cascade lasers, Staring arrays, Mirrors, Microbolometers, Free electron lasers, Reconstruction algorithms, Cameras

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Showing 5 of 8 publications

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