Dr. Ryutaro Maeda Profile

Dr. Ryutaro Maeda

at AIST

SPIE Involvement:

Author

Publications (51)

Proceedings Article | 17 September 2012 Paper

Paper

Progress with MEMS x-ray micro pore optics

Yuichiro Ezoe, Teppei Moriyama, Tomohiro Ogawa, Takuya Kakiuchi, Takaya Ohashi, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Mitsuhiro Horade, Susumu Sugiyama, Raul Riveros, Hitomi Yamaguchi, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima, Ryutaro Maeda

Proceedings Volume 8443, 84430U (2012) https://doi.org/10.1117/12.925811

KEYWORDS: X-ray optics, X-rays, Wafer-level optics, Semiconducting wafers, Silicon, Microelectromechanical systems, Spatial resolution, Mirrors, Coating, Metals

Read Abstract +

SPIE Journal Paper | 1 July 2009

Demonstration of fabricating a needle array by the combination of x-ray grayscale mask with the lithografie, galvanoformung, abformung process

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

JM3, Vol. 8, Issue 03, 033010, (July 2009) https://doi.org/10.1117/12.10.1117/1.3158617

KEYWORDS: X-rays, Photomasks, Polymethylmethacrylate, X-ray lithography, Silicon, Scanning electron microscopy, X-ray technology, Nickel, X-ray imaging, Self-assembled monolayers

Read Abstract +

Proceedings Article | 30 April 2009 Paper

Paper

Novel ultra-lightweight and high-resolution MEMS x-ray optics

Ikuyuki Mitsuishi, Yuichiro Ezoe, Utako Takagi, Makoto Mita, Raul Riveros, Hitomi Yamaguchi, Fumiki Kato, Susumu Sugiyama, Kouzou Fujiwara, Kohei Morishita, Kazuo Nakajima, Shinya Fujihira, Yoshiaki Kanamori, Noriko Yamasaki, Kazuhisa Mitsuda, Ryutaro Maeda

Proceedings Volume 7360, 73600C (2009) https://doi.org/10.1117/12.823933

KEYWORDS: X-rays, Mirrors, Silicon, X-ray optics, Microelectromechanical systems, X-ray technology, Nickel, Semiconducting wafers, Hydrogen, Wafer-level optics

Read Abstract +

Proceedings Article | 24 July 2008 Paper

Paper

Design and fabrication of TES microcalorimeters for x-ray astrophysics in Japan

Yuichiro Ezoe, Tomotaka Yoshino, Kazuma Mukai, Hiroshi Yoshitake, Hiroki Akamatsu, Kumi Ishikawa, Takayuki Takano, Ryutaro Maeda, Yoshitaka Ishisaki, Noriko Yamasaki, Kazuhisa Mitsuda, Takaya Ohashi

Proceedings Volume 7021, 70211X (2008) https://doi.org/10.1117/12.788155

KEYWORDS: Gold, Silicon, X-rays, Etching, Deep reactive ion etching, X-ray astronomy, Semiconducting wafers, Sensors, X-ray technology, Photoresist materials

Read Abstract +

Proceedings Article | 11 January 2008 Paper

Paper

Photovoltaic properties of ferroelectrics and their applications to optical sensor

Masaaki Ichiki, Harumi Furue, Takeshi Kobayashi, Yasushi Morikawa, Kazuhiro Nonaka, Ryutaro Maeda

Proceedings Volume 6800, 680011 (2008) https://doi.org/10.1117/12.760416

KEYWORDS: Photovoltaics, Electrodes, Crystals, Microelectromechanical systems, Optical sensors, Semiconductors, Lead, Scanning electron microscopy, Optical properties, Ferroelectric materials

Read Abstract +

Proceedings Article | 9 January 2008 Paper

Paper

Novel MEMS-based thermometer with low power consumption for health-monitoring network application

Y. Zhang, T. Ikehara, J. Lu, T. Kobayashi, M. Ichiki, T. Itoh, R. Maeda

Proceedings Volume 6800, 68001V (2008) https://doi.org/10.1117/12.759296

KEYWORDS: Temperature metrology, Metals, Confocal microscopy, Microfabrication, Finite element methods, Sensor technology, Gold, Molybdenum, Microelectromechanical systems, Temperature sensors

Read Abstract +

Proceedings Article | 9 January 2008 Paper

Paper

Mechanical quality factor of microcantilevers for mass sensing applications

Jian Lu, Tsuyoshi Ikehara, Yi Zhang, Takashi Mihara, Ryutaro Maeda

Proceedings Volume 6800, 68001Y (2008) https://doi.org/10.1117/12.759393

KEYWORDS: Ferroelectric materials, Silicon, Resonators, Microelectromechanical systems, Sensors, Scanning electron microscopy, Mechanical sensors, Solids, Electrodes, Signal attenuation

Read Abstract +

Proceedings Article | 9 January 2008 Paper

Paper

Measurements of silicon dry-etching rates and profiles in MEMS foundries and their application to MEMS design software

T. Takano, T. Ikehara, R. Maeda

Proceedings Volume 6800, 68001X (2008) https://doi.org/10.1117/12.759374

KEYWORDS: Etching, Photomasks, Silicon, Microelectromechanical systems, Deep reactive ion etching, Semiconducting wafers, Photoresist materials, Oxides, Databases, Plasma

Read Abstract +

Proceedings Article | 9 January 2008 Paper

Paper

A novel fabrication method of needle array combined x-ray gray mask with LIGA process

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

Proceedings Volume 6800, 68001R (2008) https://doi.org/10.1117/12.753858

KEYWORDS: X-rays, Photomasks, Polymethylmethacrylate, X-ray lithography, Silicon, X-ray technology, Nickel, Scanning electron microscopy, Photoresist processing, Etching

Read Abstract +

SPIE Journal Paper | 1 January 2008

Fabrication and evaluation of a grayscale mask for x-ray lithography using MEMS technology

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

JM3, Vol. 7, Issue 01, 013009, (January 2008) https://doi.org/10.1117/12.10.1117/1.2894817

Read Abstract +

Proceedings Article | 3 October 2007 Paper

Paper

The first light of a single-stage MEMS x-ray optic

Masaki Koshiishi, Yuichiro Ezoe, Makoto Mita, Yoshitomo Maeda, Kazuhisa Mitsuda, Masaki Suzuki, Takeyuki Osawa, Akio Hoshino, Yoshitaka Ishisaki, Takayuki Takano, Ryutaro Maeda

Proceedings Volume 6688, 668814 (2007) https://doi.org/10.1117/12.733912

KEYWORDS: X-ray optics, Mirrors, X-rays, Silicon, Wafer-level optics, Microelectromechanical systems, Semiconducting wafers, Etching, Reflectivity, Reflection

Read Abstract +

Proceedings Article | 21 March 2007 Paper

Paper

Three-dimensional X-ray lithography using a silicon mask with inclined absorbers

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

Proceedings Volume 6517, 651735 (2007) https://doi.org/10.1117/12.711824

KEYWORDS: X-rays, X-ray lithography, Photomasks, Silicon, Polymethylmethacrylate, Scanning electron microscopy, X-ray technology, Etching, Microelectromechanical systems, X-ray imaging

Read Abstract +

Proceedings Article | 22 December 2006 Paper

Paper

Low-temperature processing of lead zirconate titanate thin films by 28 GHz microwave irradiation for MEMS application

Z. Wang, H. Kokawa, H. Takizawa, M. Ichiki, R. Maeda

Proceedings Volume 6413, 641308 (2006) https://doi.org/10.1117/12.695608

KEYWORDS: Ferroelectric materials, Microwave radiation, Crystals, Thin films, Silicon, Sol-gels, Scanning electron microscopy, Microelectromechanical systems, Annealing, Perovskite

Read Abstract +

Proceedings Article | 13 June 2006 Paper

Paper

Recent development of micropore optics using MEMS technologies

Yuichiro Ezoe, Masaki Koshiishi, Makoto Mita, Kazuhisa Mitsuda, Yoshitaka Ishisaki, Akio Hoshino, Zhen Yang, Takayuki Takano, Harutaka Mekaru, Ryutaro Maeda

Proceedings Volume 6266, 62661B (2006) https://doi.org/10.1117/12.670736

KEYWORDS: Silicon, Semiconducting wafers, Etching, Microelectromechanical systems, X-rays, X-ray optics, Wafer-level optics, Mirrors, Optics manufacturing, Oxides

Read Abstract +

Proceedings Article | 19 January 2006 Paper

Paper

Conception and design of a thermal valveless micropump

G. Manzoni, S. Heisig, T. Takano, C. Kocer, H. Goto, T. Mihara, R. Maeda

Proceedings Volume 6036, 60360I (2006) https://doi.org/10.1117/12.638467

KEYWORDS: Microfluidics, Diodes, Terbium, Differential equations, Thermal modeling, Semiconducting wafers, 3D modeling, Fluid dynamics, Antimony, Calibration

Read Abstract +

Proceedings Article | 5 January 2006 Paper

Paper

Photovoltaic effect of ferroelectric PLZT in a layered and preferentially oriented film

Masaaki Ichiki, Harumi Furue, Takeshi Kobayashi, Yasushi Morikawa, Takeshi Nakada, Chiaki Endo, Kazuhiro Nonaka, Ryutaro Maeda

Proceedings Volume 6035, 60350P (2006) https://doi.org/10.1117/12.638323

KEYWORDS: Photovoltaics, Crystals, Semiconductors, Optical sensors, Microelectromechanical systems, Lead, Optical properties, Ferroelectric materials, Lanthanum, Scanning electron microscopy

Read Abstract +

Proceedings Article | 28 February 2005 Paper

Paper

Fabrication and tests of a MEMS-based double-beam cantilever flow sensor with clarifying of temperature effect

Junguo Pang, Takehiko Segawa, Tsuyoshi Ikehara, Hiro Yoshida, Yoshihiro Kikushima, Hiroyuki Abe, Ryutaro Meada

Proceedings Volume 5649, (2005) https://doi.org/10.1117/12.582250

KEYWORDS: Sensors, Calibration, Temperature metrology, Velocity measurements, Semiconducting wafers, Skin, Control systems, Wheatstone bridges, Amplifiers, Microelectromechanical systems

Read Abstract +

Proceedings Article | 23 February 2005 Paper

Paper

Development of a MEMS-based micro combustor for a micro gas turbine engine

Xue Chuan Shan, Yu Jin, Zhen Wang, Chee Khuen Wong, Y. Murakoshi, Ryutaro Maeda

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.580783

KEYWORDS: Semiconducting wafers, Deep reactive ion etching, Combustion, Etching, Temperature metrology, Silicon, Hydrogen, Prototyping, Photoresist materials, Optical lithography

Read Abstract +

Proceedings Article | 2 April 2004 Paper

Paper

Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet

Yoichi Murakoshi, Xue-Chuan Shan, Toshio Sano, Masaharu Takahashi, Ryutaro Maeda

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522898

KEYWORDS: Mirrors, Nickel, Optical switching, Microelectromechanical systems, Polymers, Optical design, Scanning electron microscopy, Nanoelectromechanical systems, Optical semiconductors, Semiconductors

Read Abstract +

Proceedings Article | 2 April 2004 Paper

Paper

High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine

Xue Shan, Yoichi Murakoshi, Zhenfeng Wang, H. Lu, Yufeng Jin, Tsuyoshi Ikehara, Ryutaro Maeda, C. Wong

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522918

KEYWORDS: Semiconducting wafers, Etching, Deep reactive ion etching, Plasma, Silicon, Photoresist materials, Photomasks, Ions, Surface roughness, Process control

Read Abstract +

Proceedings Article | 2 April 2004 Paper

Paper

Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror

Takeshi Kobayashi, Jiunnjye Tsaur, Masaaki Ichiki, Ryutaro Maeda

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.530229

KEYWORDS: Ferroelectric materials, Mirrors, Micromirrors, Silicon, Etching, Wavelength division multiplexing, Sol-gels, Actuators, Scanning electron microscopy, Electrodes

Read Abstract +

Proceedings Article | 2 April 2004 Paper

Paper

Formation and its characteristics of PLZT layered film structure for transducers

Masaaki Ichiki, Takeshi Kobayashi, Yasushi Morikawa, Yosuke Mabune, Takeshi Nakada, Kazuhiro Nonaka, Chiaki Endo, Ryutaro Maeda

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522794

KEYWORDS: Photovoltaics, Electrodes, Ceramics, Crystals, Transducers, Microelectromechanical systems, Scanning electron microscopy, Lead, Photovoltaic materials, Perovskite

Read Abstract +

Proceedings Article | 2 April 2004 Paper

Paper

Preparation of PZT films derived by hybrid processing for MEMS application

Lijun Yan, Zhan Jie Wang, Hiroyuki Kokawa, Ryutaro Maeda

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522807

KEYWORDS: Ferroelectric materials, Sol-gels, Silicon, Crystals, Pulsed laser deposition, Annealing, Transmission electron microscopy, Image processing, Dielectrics, Perovskite

Read Abstract +

Proceedings Article | 29 March 2004 Paper

Paper

Microneedle array and insertion guide array for safe use of biomedical applications

Sommawan Khumpuang, Ryutaro Maeda, Susumu Sugiyama

Proceedings Volume 5275, (2004) https://doi.org/10.1117/12.522939

KEYWORDS: Silicon, Skin, Biomedical optics, Semiconducting wafers, Fabrication, Microfluidics, Etching, Chromium, Bulk micromachining, Plasma etching

Read Abstract +

Proceedings Article | 16 February 2004 Paper

Paper

In situ deposition of epitaxial PZT films by pulsed laser deposition

Zhan Jie Wang, Li Jun Yan, Hiroyuki Kokawa, Ryutaro Maeda

Proceedings Volume 5648, (2004) https://doi.org/10.1117/12.581399

KEYWORDS: Ferroelectric materials, Sol-gels, Silicon, Crystals, Transmission electron microscopy, Image processing, Lead, Pulsed laser deposition, Thin films, Perovskite

Read Abstract +

Proceedings Article | 13 November 2002 Paper

Paper

Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation

Lulu Zhang, Masaaki Ichiki, Zhanjie Wang, Ryutaro Maeda

Proceedings Volume 4934, (2002) https://doi.org/10.1117/12.469049

KEYWORDS: Ferroelectric materials, Sol-gels, Laser ablation, Thin films, Dielectric polarization, Dielectrics, Fabrication, Excimer lasers, Crystals, Perovskite

Read Abstract +

Proceedings Article | 13 November 2002 Paper

Paper

Deposition of Pb(ZrTi)O3 thin films by pulsed laser ablation for MEMS application

Zhan Jie Wang, Ryutaro Maeda, Hiroyuki Kokawa

Proceedings Volume 4934, (2002) https://doi.org/10.1117/12.469043

KEYWORDS: Ferroelectric materials, Crystals, Dielectrics, Laser ablation, Lead, Dielectric polarization, Thin films, Annealing, X-ray diffraction, Perovskite

Read Abstract +

Proceedings Article | 13 November 2002 Paper

Paper

Resonant-type microscanners fabricated by hybrid PZT deposition process on SOI wafers

Jiunn-Jye Tsaur, Zhanjie Wang, Lulu Zhang, Masaaki Ichiki, Ryutaro Maeda, Tadatomo Suga

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469675

KEYWORDS: Ferroelectric materials, Mirrors, Sol-gels, Silicon, Laser ablation, Semiconducting wafers, Silicon films, Polarization, Actuators, Scanning electron microscopy

Read Abstract +

Proceedings Article | 13 November 2002 Paper

Paper

Optimization of Au mask fabrication processes for LIGA applications

Xue Shan, Ryutaro Maeda, Tsuyoshi Ikehara, H. Mekaru, T. Hattori

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.471926

KEYWORDS: Gold, Photomasks, Etching, X-rays, Mirrors, Optical switching, Electroplating, Micromirrors, Polymethylmethacrylate, Photoresist materials

Read Abstract +

Proceedings Article | 13 November 2002 Paper

Paper

A world-to-chip socket for microfluidic prototype development

Zhen Yang, Ryutaro Maeda

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469433

KEYWORDS: Microfluidics, Packaging, Silicon, Prototyping, Microelectromechanical systems, Interfaces, Lead, Standards development, Glasses, Resistance

Read Abstract +

Proceedings Article | 13 November 2002 Paper

Paper

Development of a micro hot embossing process for fabricating micro optical devices

Xue Shan, Ryutaro Maeda, Yoichi Murakoshi

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469430

KEYWORDS: Mirrors, Optical switching, Switches, Polymers, Annealing, Micromirrors, Nickel, Silicon, Optical components, Microelectromechanical systems

Read Abstract +

Proceedings Article | 13 November 2002 Paper

Paper

Microfabrication of thick and bulk PZT materials for piezoelectric actuator

Sung Ho Lee, Ryutaro Maeda, Masayoshi Esashi

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.476088

KEYWORDS: Ferroelectric materials, Silicon, Actuators, Etching, Semiconducting wafers, Electrodes, Silicon films, Reactive ion etching, Wet etching, Platinum

Read Abstract +

Proceedings Article | 11 July 2002 Paper

Paper

Biomimetic actuator based on dielectric polymer

Hyoukryeol Choi, Sungmoo Ryew, Kwangmok Jung, Jaewook Jeon, Hunmo Kim, Jaedo Nam, Atsuo Takanishi, Ryutaro Maeda, K. Kaneko, Kazuo Tanie

Proceedings Volume 4695, (2002) https://doi.org/10.1117/12.475158

KEYWORDS: Actuators, Polymers, Dielectrics, Electrodes, Polymeric actuators, Biomimetics, Mathematical modeling, Artificial muscles, Robotics, Electroactive polymers

Read Abstract +

Proceedings Article | 21 November 2001 Paper

Paper

Optical switch array based on microforming process

Yusuke Hashiura, Tsuyoshi Ikehara, Akiko Kitajima, Hiroshi Goto, Ryutaro Maeda

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448996

KEYWORDS: Silicon, Polymers, Polymethylmethacrylate, Optical switching, Switches, Nickel, Mirrors, Electrodes, Actuators, Optical arrays

Read Abstract +

Proceedings Article | 21 November 2001 Paper

Paper

Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and vacuum metal casting

Yoichi Murakoshi, Kotaro Hanada, Yaomin Li, Kazuyoshi Uchino, Takaaki Suzuki, Ryutaro Maeda

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.449004

KEYWORDS: Metals, Semiconducting wafers, Silicon, Etching, Wafer bonding, Microelectromechanical systems, Photomasks, Image processing, Packaging, Scanning electron microscopy

Read Abstract +

Proceedings Article | 15 October 2001 Paper

Paper

Microsensors and actuator arrays based on Pb(Zr,Ti)O3 thin film for AFM data-storage

Jiaru Chu, Junfeng Lu, Yicheng Wu, Wenhao Huang, Ryutaro Maeda, Toshihiro Itoh, Tadatomo Suga

Proceedings Volume 4601, (2001) https://doi.org/10.1117/12.444739

Read Abstract +

Proceedings Article | 9 July 2001 Paper

Paper

Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition

Masaaki Ichiki, Lulu Zhang, Zhanjie Wang, Yasushi Morikawa, Makoto Tanaka, Ryutaro Maeda

Proceedings Volume 4467, (2001) https://doi.org/10.1117/12.432952

KEYWORDS: Ferroelectric materials, Scanning electron microscopy, Lead, Annealing, Crystals, Heat treatments, X-ray diffraction, Laser ablation, Deposition processes, Perovskite

Read Abstract +

Proceedings Article | 5 April 2001 Paper

Paper

Development of microelectromechanical varactors

Chun-Hsien Lee, Shu-Hui Tsai, Chung-Hsien Lin, Ryutaro Maeda, Jiunn-Jye Tsaur, Kuan-Jen Fang, Ju-Mei Lu, Cheng-Kuo Lee, Weileun Fang

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425389

KEYWORDS: Capacitance, Electrodes, Finite element methods, Electroplating, Capacitors, Microelectromechanical systems, Semiconductors, Nickel, Silicon, Resistance

Read Abstract +

Proceedings Article | 5 April 2001 Paper

Paper

Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and metal powder injection

Yoichi Murakoshi, Toru Shimizu, Hideki Takagi, Yaomin Li, Kazuyoshi Uchino, Tetsuro Yokoi, Ryutaro Maeda

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425391

KEYWORDS: Metals, Semiconducting wafers, Silicon, Etching, Wafer bonding, Photomasks, Microelectromechanical systems, Image processing, Packaging, Scanning electron microscopy

Read Abstract +

Proceedings Article | 5 April 2001 Paper

Paper

Microscanner actuated by double PZT thin film

Lulu Zhang, Wenmei Lin, Ryutaro Maeda

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425394

KEYWORDS: Ferroelectric materials, Electrodes, Scanners, Thin films, Sol-gels, Heat treatments, Etching, Dielectrics, Silicon, Mirrors

Read Abstract +

Proceedings Article | 5 April 2001 Paper

Paper

Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin films for microactuators

Zhanjie Wang, Ryutaro Maeda, Hiroyuki Kokawa

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425390

KEYWORDS: Ferroelectric materials, Lead, Thin films, Annealing, Laser ablation, Dielectric polarization, Dielectrics, Crystals, Scanning electron microscopy, Perovskite

Read Abstract +

Proceedings Article | 21 March 2001 Paper

Paper

Si-based print circuit board fabricated by Si deep etching and metal powder injection molding

Ryutaro Maeda, Yoichi Murakoshi, Toru Shimizu, Yaomin Li, Hiroyuki Takizawa

Proceedings Volume 4235, (2001) https://doi.org/10.1117/12.420860

KEYWORDS: Silicon, Etching, Metals, Smart structures

Read Abstract +

Proceedings Article | 21 March 2001 Paper

Paper

Ferroelectric Pb(Zr0.53, Ti0.47)O3 thin films for smart MEMS

Ryutaro Maeda, Zhanjie Wang, Jiaru Chu, Wenmei Lin

Proceedings Volume 4235, (2001) https://doi.org/10.1117/12.420846

KEYWORDS: Ferroelectric materials, Thin films, Silicon, Sol-gels, Electrodes, Microelectromechanical systems, Actuators, Lead, Data storage, Scanning electron microscopy

Read Abstract +

Ferroelectric thin film is the target of the interest in micro electromechanical system, memory etc. Smart MEMS is to be developed with such smart materials thin films. In spite of the success in commercialization of FRAM application, MEMS application is still under R&D state. Despite to their promising properties, there are only few reports on the use of such layers as MEMS devices. Problems for application are mainly caused by the necessary very small dimension of such devices, in contrast to limitations and tolerances of the used micro-technologies. Although deposition of piezoelectric PZTlayer using different thin-film technologies has reached an advanced state, the layers of more than 1 micron thickness needed for MEMS applications is still difficult to deposit. To deal with these problems, the structure or the function of the devices has to be coped with such technologically caused constraints, like thickness deviation and deformation by residual stress, as well as optimization of materials processing parameters. As an application of the thin films, Piezoelectric SFM and scanning mirror device are designed and fabricated as examples of the target MEMS devices with special emphases placed on materials, processing and device structure optimization. Sol gel deposited as well as Pulsed Laser Ablation Deposited PZT layers have been developed and applied for the devices. To compensate the deformation of the devices, bimorph PZT actuator is also presented. A piezoelectric SPM is expected to provide a promising answer to High density data storage devices, as the piezoelectric layer serves as a actuator for the cantilever as well as a force sensor. This paper describes a novel probe arrays integrated with micro-heaters for the AFM thermal mechanical data storage. The probes have cantilevers 3um thick, 100-200um long, and 30-70um wide, and have micro-heater integrated on the triangle end of the cantilever. The cantilever consists of a piezoelectric layer on a silicon base for the heater actuation and force sensing. The Lead-Titanate-Zirconate (PZT) is selected as the piezoelectric material for its high piezoelectric coefficients comparing to crystal materials (for example, ZnO2). We design the heater on the triangle end of the cantilever, and shape the apex part as the narrowest to get the biggest power dissipation. The prototype of the device has been fabricated and characterized.

Proceedings Article | 1 October 1999 Paper

Paper

Two-dimensional microscanner actuated by PZT thin film

Wenmei Lin, Andreas Schroth, Sohei Matsumoto, Cheng-Kuo Lee, Ryutaro Maeda

Proceedings Volume 3892, (1999) https://doi.org/10.1117/12.364510

KEYWORDS: Ferroelectric materials, Thin films, Mirrors, Actuators, Etching, Sol-gels, Thin film deposition, Scanners, Silicon, Interferometers

Read Abstract +

Proceedings Article | 10 March 1999 Paper

Paper

Microfabrication technique for thick structure of metals and PZT

Toru Shimizu, Yoichi Murakoshi, Zhanjie Wang, Ryutaro Maeda, Toshio Sano

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341236

KEYWORDS: Ferroelectric materials, Coating, Metals, Photography, Thin film coatings, Silicon, Semiconducting wafers, Ceramics, Laser ablation, Microfabrication

Read Abstract +

Proceedings Article | 10 March 1999 Paper

Paper

Preparation and characterization of sol-gel-derived PZT thin films for microactuators

Zhanjie Wang, Ryutaro Maeda, Kaoru Kikuchi

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341162

KEYWORDS: Ferroelectric materials, Thin films, Dielectrics, Dielectric polarization, Sol-gels, Scanning electron microscopy, Lead, Crystals, Heat treatments, Actuators

Read Abstract +

Proceedings Article | 1 June 1998 Paper

Paper

Transient measurement of surface deflection for beams and membranes in micromechanical devices

Andreas Klein, Andreas Schroth, Gerald Gerlach, Ryutaro Maeda

Proceedings Volume 3411, (1998) https://doi.org/10.1117/12.307748

KEYWORDS: Mirrors, Actuators, Silicon, Sensors, Velocity measurements, Microfluidics, Ferroelectric materials, Electrodes, Interferometers, Liquids

Read Abstract +

Proceedings Article | 14 November 1997 Paper

Paper

Application of jet-printed PZT layers for actuation of small beams, membranes and a 2D scanning actuator

Andreas Schroth, Masaaki Ichiki, Ryutaro Maeda, Jun Akedo, Sohei Matsumoto

Proceedings Volume 3242, (1997) https://doi.org/10.1117/12.293545

KEYWORDS: Ferroelectric materials, Actuators, Electrodes, Scanners, Silicon, Printing, Microelectromechanical systems, Laser ablation, Anisotropic etching, Interferometers

Read Abstract +

Proceedings Article | 14 November 1997 Paper

Paper

Micropump based on temperature dependence of liquid viscosity

Sohei Matsumoto, Andreas Klein, Andreas Schroth, Ryutaro Maeda

Proceedings Volume 3242, (1997) https://doi.org/10.1117/12.293557

KEYWORDS: Liquids, Prototyping, Silicon, Resistance, Finite element methods, Fluid dynamics, Temperature metrology, Oxides, Microfluidics, Convection

Read Abstract +

Proceedings Article | 14 November 1997 Paper

Paper

Deposition of PZT thin films by pulsed laser ablation for MEMS application

Ryutaro Maeda, Kaoru Kikuchi, Andreas Schroth, Akihiko Umezawa, Sohei Matsumoto

Proceedings Volume 3242, (1997) https://doi.org/10.1117/12.293559

KEYWORDS: Ferroelectric materials, Thin films, Microelectromechanical systems, Annealing, Laser ablation, Oxygen, Thin film deposition, Sputter deposition, Excimer lasers, Chemical species

Read Abstract +

Proceedings Article | 14 November 1997 Paper

Paper

Characterization and application of jet-printed thin PZT layers for actuation of MEMS

Andreas Schroth, Masaaki Ichiki, Ryutaro Maeda, Jun Akedo

Proceedings Volume 3242, (1997) https://doi.org/10.1117/12.293560

KEYWORDS: Ferroelectric materials, Microelectromechanical systems, Annealing, Dielectrics, Actuators, Electrodes, Silicon, Temperature metrology, Deposition processes, Erbium

Read Abstract +

Showing 5 of 51 publications

Conference Committee Involvement (1)

Micromachining and Microfabrication

30 March 1999 | Paris, France

SIGN IN TO:

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Advertisement

Advertisement