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Shinichi Mori
at Nikon Corp
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Publications (1)
Proceedings Article | 12 April 2013 Paper
Imaging application tools for extremely low-k1 ArF immersion lithography
Shinichi Mori, Hajime Aoyama, Taro Ogata, Ryota Matsui, Tomoyuki Matsuyama
Proceedings Volume 8683, 86830A (2013) https://doi.org/10.1117/12.2011382
KEYWORDS: Scanners, Metrology, Photomasks, Wavefronts, Image processing, Overlay metrology, Distortion, Reticles, Semiconducting wafers, Fiber optic illuminators
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