Ms. Sachiko Shinjo Profile

Sachiko Shinjo

at Mitsubishi Gas Chemical Co., Inc.

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Publications (2)

Proceedings Article | 9 April 2024 Poster + Paper

Application of higher absorption materials to the underlayer of EUV lithography

Tadashi Omatsu, Sachiko Shinjo, Masatoshi Echigo, Yuki Ishimaru, Takahiro Kozawa

Proceedings Volume 12957, 1295723 (2024) https://doi.org/10.1117/12.3012067

KEYWORDS: Extreme ultraviolet lithography, Absorption, Extreme ultraviolet, Photons, Photoresist processing, Electrons, Iodine, Stochastic processes

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Proceedings Article | 3 October 2018 Paper

EUV sensitizer for resists and spin-on-carbon materials

Takashi Sato, Yuta Togashi, Sachiko Shinjo, Takumi Toida, Takashi Makinoshima, Masatoshi Echigo

Proceedings Volume 10809, 108091X (2018) https://doi.org/10.1117/12.2323096

KEYWORDS: Extreme ultraviolet, Absorption, Transmittance, Chemical elements, Iodine, Extreme ultraviolet lithography, Mass attenuation coefficient, Resist chemistry

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