Dr. Sai Gao
at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 21 June 2019 Presentation + Paper
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Optical microscopy, 3D metrology

Proceedings Article | 7 June 2017 Paper
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Microelectromechanical systems, Actuators, Microscopes, Metrology, Graphene, Calibration, Microscopy, Silicon, Atomic force microscopy, Head, Transducers, Sensing systems, Atomic force microscope, Scanning probe microscopy, Microfabrication, Prototyping

Proceedings Article | 21 May 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Calibration, Etching, Atomic force microscopy, Transducers, Photomasks, Reactive ion etching, Semiconducting wafers, Autoregressive models, Wafer bonding

Proceedings Article | 21 May 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Metrology, Sensors, Calibration, Silicon, Atomic force microscopy, Bridges, Sensor calibration, Standards development, Microtechnology

Proceedings Article | 1 May 2014 Paper
Proc. SPIE. 9132, Optical Micro- and Nanometrology V
KEYWORDS: Microelectromechanical systems, Iron, Interferometers, Calibration, Microscopy, Silicon, Fourier transforms, Atomic force microscopy, Transducers, Finite element methods

Showing 5 of 15 publications
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