Mr. Same-Ting Chen Profile

Same-Ting Chen

Section Manager at Taiwan Semiconductor Manufacturing Co Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 28 August 2003 Paper

Same-Ting Chen, Tzy-Ying Lin, Chue-San Yoo

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504063

KEYWORDS: Gallium, Photomasks, Critical dimension metrology, Quartz, Polymers, Transmittance, Binary data, Etching, Ion beams, Semiconducting wafers

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