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Dr. Samer Banna
Sr. Director of Engineering at Applied Materials Inc
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 29 March 2013 Paper
Characterization of silicon etching in synchronized pulsed plasma
M. Darnon, M. Haass, G. Cunge, O. Joubert, S. Banna
Proceedings Volume 8685, 86850J (2013) https://doi.org/10.1117/12.2011462
KEYWORDS: Plasma, Ions, Etching, Silicon, Plasma etching, Oxygen, Semiconducting wafers, Information operations, Mass spectrometry
Proceedings Article | 17 March 2012 Paper
Towards new plasma technologies for 22nm gate etch processes and beyond
O. Joubert, M. Darnon, G. Cunge, E. Pargon, D. Thibault, C. Petit-Etienne, L. Vallier, N. Posseme, P. Bodart, L. Azarnouche, R. Blanc, M. Haas, M. Brihoum, S. Banna, T. Lill
Proceedings Volume 8328, 83280D (2012) https://doi.org/10.1117/12.920312
KEYWORDS: Plasma, Etching, Silicon, Ions, Plasma etching, Semiconducting wafers, Silica, Oxides, Oxidation
Proceedings Article | 25 February 2008 Paper
First experimental evidence for PASER: particle acceleration by stimulated emission of radiation
Samer Banna, Valery Berezovsky, Levi Schächter
Proceedings Volume 6881, 68810E (2008) https://doi.org/10.1117/12.763299
KEYWORDS: Modulation, Pulsed laser operation, Chemical species, Electron beams, Carbon dioxide lasers, Photons, Spectroscopy, Atmospheric particles, Carbon dioxide, Particles
Conference Committee Involvement (2)
Commercial and Biomedical Applications of Ultrafast Lasers IX
25 January 2009 | San Jose, California, United States
Commercial and Biomedical Applications of Ultrafast Lasers VIII
20 January 2008 | San Jose, California, United States
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