Mr. Sami Abada Profile

Sami Abada

at Labo Automatiq Analyses Systemes;Laas Cnrs

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Publications (2)

Proceedings Article | 2 May 2014 Paper

3D optimization of a polymer MOEMS for active focusing of VCSEL beam

S. Abada, T. Camps, B. Reig, JB Doucet, E. Daran, V. Bardinal

Proceedings Volume 9130, 913003 (2014) https://doi.org/10.1117/12.2052482

KEYWORDS: Microopto electromechanical systems, 3D modeling, Polymers, Vertical cavity surface emitting lasers, Electrodes, Microlens, Gold, Microelectromechanical systems, 3D metrology, Titanium

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Proceedings Article | 2 May 2014 Paper

Uniform fabrication of thick SU-8 patterns on small-sized wafers for micro-optics applications

S. Abada, B. Reig, E. Daran, JB Doucet, T. Camps, S. Charlot, V. Bardinal

Proceedings Volume 9130, 91300R (2014) https://doi.org/10.1117/12.2052451

KEYWORDS: Printing, Semiconducting wafers, Silicon, Optical lithography, Ultraviolet radiation, Vertical cavity surface emitting lasers, Micro optics, Photomasks, Polymers, Microlens

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