CONFERENCE PROCEEDINGS
Advanced Search
Dr. Samir Derrough
at Commissariat à l'Energie Atomique
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 15 May 2010 Paper
193nm resist deprotection study from outgassing measurements by TD-GCMS/FID
Raluca Tiron, Samir Derrough, Hervé Fontaine, Sylviane Cetre, Damien Perret, James Thackeray, Patrick Paniez
Proceedings Volume 7545, 75450G (2010) https://doi.org/10.1117/12.863150
KEYWORDS: Semiconducting wafers, Polymers, Diffusion, Ionization, Sensors, Molecules, Statistical analysis, Chromatography, Spectroscopy, Lithography
Proceedings Article | 26 March 2010 Paper
Continuous evolution of lithographic films through process steps: an example with 193 chemically amplified resists
Samir Derrough, Raluca Tiron, Damien Perret, James Thackeray, Claire Sourd, Patrick Paniez
Proceedings Volume 7639, 763937 (2010) https://doi.org/10.1117/12.846087
KEYWORDS: Diffusion, Lithography, Temperature metrology, Chemically amplified resists, Photoresist processing, Glasses, Line edge roughness, Systems modeling, Thermal analysis, Complex systems
Proceedings Article | 26 March 2008 Paper
Post-lithography characterization of ArF resists for 45 nm node implant layers and beyond
Proceedings Volume 6923, 69231D (2008) https://doi.org/10.1117/12.769466
KEYWORDS: Ions, Boron, Atomic force microscopy, Semiconducting wafers, Scanning electron microscopy, Fourier transforms, Silicon, Critical dimension metrology, Lithography, Monte Carlo methods
Proceedings Article | 16 May 2007 Paper
Mechanical dynamical analysis of ultra thin resist films for microlithography applications
C. Petitdidier, R. Tiron, S. Derrough, C. Sourd, L. Koscianski, B. Mortini
Proceedings Volume 6591, 65910I (2007) https://doi.org/10.1117/12.724202
KEYWORDS: Glasses, Polymethylmethacrylate, Polymers, Temperature metrology, Thin films, Lithography, Silicon films, Polymer thin films, Silicon, Microelectronics
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top