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Sandrine Aubry
at ENSPS LSP
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Author
Publications (1)
Proceedings Article | 1 September 2004 Paper
Fabrication of multilevel reflective diffractive optical elements by means of laser ablation lithography
Sandrine Aubry, Philippe Gerard, Manuel Flury, Abderrazzaq Benatmane, Jean Pierre Schunck, Joel Fontaine, Paul Montgomery
Proceedings Volume 5456, (2004) https://doi.org/10.1117/12.545394
KEYWORDS: Diffractive optical elements, Etching, Reflectivity, Laser ablation, Finite-difference time-domain method, Lithography, Diffraction, Photomasks, Fabrication, High power lasers
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