Dr. Sang Hoon Lee Profile

Dr. Sang Hoon Lee

at Thermo Fisher Scientific Inc

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Publications (1)

Proceedings Article | 20 March 2020 Paper

Metrology of 3D-NAND structures using machine learning assisted fast marching level-sets algorithm

Umesh Adiga, Derek Higgins, Sang Hoon Lee, Mark Biedrzycki, Dan Nelson

Proceedings Volume 11325, 1132530 (2020) https://doi.org/10.1117/12.2552080

KEYWORDS: Metrology, Interfaces, Machine learning, Image segmentation, Scanning electron microscopy, Transmission electron microscopy, Image resolution, Image filtering, Cadmium sulfide, Scanning transmission electron microscopy

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