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Saori Fukui
at Nikon Corp
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Publications (1)
Proceedings Article | 16 June 2003 Paper
Novel electron optics for large subfield electron-beam projection lithography (EPL)
Saori Fukui, Hiroyasu Shimizu, Weiming Ren, Shohei Suzuki, Kazuya Okamoto
Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.484934
KEYWORDS: Geometrical optics, Reticles, Point spread functions, Diffraction, Distortion, Projection lithography, Electron beam lithography, Wafer-level optics, Semiconducting wafers, Convolution
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