Dr. Sarah J. Lukes Profile

Dr. Sarah J. Lukes

Founder/CEO at Agile Focus Designs LLC

SPIE Involvement:

Author | Career Panelist | Special Event Speaker

Publications (8)

Proceedings Article | 12 March 2014 Paper

Agile scanning using a MEMS focus control mirror in a commercial confocal microscope

Sarah Lukes, David Dickensheets

Proceedings Volume 8949, 89490W (2014) https://doi.org/10.1117/12.2042249

KEYWORDS: Mirrors, Microelectromechanical systems, Electrodes, Microscopes, Point spread functions, Confocal microscopy, Objectives, Monochromatic aberrations, Semiconducting wafers, Silicon

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Proceedings Article | 16 February 2012 Paper

MEMS focus control and spherical aberration correction for multilayer optical discs

Sarah Lukes, David Dickensheets

Proceedings Volume 8252, 82520L (2012) https://doi.org/10.1117/12.910632

KEYWORDS: Monochromatic aberrations, Mirrors, Electrodes, Microelectromechanical systems, Digital video discs, Glasses, Objectives, Deformable mirrors, Optical discs, Gold

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Proceedings Article | 7 February 2012 Paper

Stress engineering for free-standing SU-8 2002 thin film devices

Kyle Oliver, Sarah Lukes, Mohammad Moghimi, David Dickensheets

Proceedings Volume 8248, 82480H (2012) https://doi.org/10.1117/12.910967

KEYWORDS: Semiconducting wafers, Ultraviolet radiation, Etching, Silicon, Thin films, Temperature metrology, Thin film devices, Silicon films, Manufacturing, Microelectromechanical systems

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Proceedings Article | 14 February 2011 Paper

SU-8 focus control mirrors released by XeF2 dry etch

Sarah Lukes, David Dickensheets

Proceedings Volume 7930, 793006 (2011) https://doi.org/10.1117/12.877077

KEYWORDS: Mirrors, Etching, Monochromatic aberrations, Silicon, Control systems, Microelectromechanical systems, Electrodes, Dry etching, Microscopy, Gold

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Proceedings Article | 17 February 2010 Paper

MEMS deformable mirrors for focus control in vital microscopy

B. Jeffrey Lutzenburger, Mohammad Moghimi, Sarah Lukes, Brant Kaylor, David Dickensheets

Proceedings Volume 7594, 759406 (2010) https://doi.org/10.1117/12.843874

KEYWORDS: Mirrors, Microelectromechanical systems, Microscopy, Semiconducting wafers, Imaging systems, Electrodes, Monochromatic aberrations, Deformable mirrors, Control systems, Etching

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Proceedings Article | 17 February 2010 Paper

Surface micro-machined SU-8 2002 membrane mirrors for focus control

Sarah Lukes, David Lämmle, David Dickensheets

Proceedings Volume 7594, 75940E (2010) https://doi.org/10.1117/12.844292

KEYWORDS: Mirrors, Silicon, Electrodes, Gold, Semiconducting wafers, Oxides, Etching, Deformable mirrors, Microelectromechanical systems, Control systems

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SPIE Journal Paper | 1 October 2009

Feedback-stabilized deformable membrane mirrors for focus control

Sarah Lukes, Phillip Himmer, Eric Moog, Steven Shaw, David Dickensheets

JM3, Vol. 8, Issue 04, 043040, (October 2009) https://doi.org/10.1117/12.10.1117/1.3249659

KEYWORDS: Capacitance, Feedback control, Mirrors, Control systems, Actuators, Microelectromechanical systems, Deformable mirrors, Oscillators, Capacitors, Electrodes

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Proceedings Article | 24 February 2009 Paper

Feedback stabilized deformable membrane mirrors for focus control

Sarah Lukes, Phillip Himmer, Eric Moog, Steven Shaw, David Dickensheets

Proceedings Volume 7208, 72080Q (2009) https://doi.org/10.1117/12.812338

KEYWORDS: Mirrors, Capacitance, Feedback control, Oscillators, Control systems, Actuators, Silicon, Microelectromechanical systems, Deformable mirrors, Capacitors

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Showing 5 of 8 publications

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