CONFERENCE PROCEEDINGS
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Sarah Mohamed
at Siemens EDA
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Publications (2)
Proceedings Article | 29 March 2013 Paper
Model based hint for litho hotspot fixing beyond 20nm node
Jae-Hyun Kang, Byung-Moo Kim, Naya Ha, Hung bok Choi , Kee sup Kim , Sarah Mohamed, Kareem Madkour, Wael ElManhawy, Evan Lee, Jean-Marie Brunet, Joe Kwan
Proceedings Volume 8684, 86840N (2013) https://doi.org/10.1117/12.2011619
KEYWORDS: Lithography, Double patterning technology, Design for manufacturing, Resolution enhancement technologies, Manufacturing, Bridges, Visualization, Design for manufacturability, Metals, Electronics
Proceedings Article | 15 March 2012 Paper
Advanced techniques for design assembly and characterization for the 14nm node with LFD using a black box API
Juliann Opitz, Andres Torres, Ioana Graur, Wael Manhawy, Suniti Kanodia, Marwah Shafee, Sarah Mohamed, Ahmed Hassand, Jeanne Bickford
Proceedings Volume 8327, 832711 (2012) https://doi.org/10.1117/12.916431
KEYWORDS: Manufacturing, Photomasks, Optical lithography, Design for manufacturing, Double patterning technology, Lithography, Design for manufacturability, Visualization, Resolution enhancement technologies, Interfaces
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