Dr. Satoshi Gonda
Researcher at National Inst of Adv Industrial Sci and Technology
SPIE Involvement:
Conference Program Committee | Author
Publications (18)

SPIE Journal Paper | 23 October 2020
JM3 Vol. 19 Issue 04

SPIE Journal Paper | 23 March 2020
JM3 Vol. 19 Issue 01
KEYWORDS: Line edge roughness, Metrology, Atomic force microscopy, Clouds, Scanning electron microscopy, Atomic force microscope, Servomechanisms, 3D metrology, Transmission electron microscopy, Semiconductors

Proceedings Article | 20 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Scanning electron microscopy, Line edge roughness, 3D metrology, Metrology, Spatial resolution, Edge roughness, Atomic force microscopy, 3D image processing, Error analysis, Lithography

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Line edge roughness, Metrology, Atomic force microscopy, Scanning electron microscopy, 3D metrology, Surface roughness, Semiconductors, Lithography, Critical dimension metrology, Dimensional metrology

Proceedings Article | 6 August 2014 Paper
Proc. SPIE. 9232, International Conference on Optical Particle Characterization (OPC 2014)
KEYWORDS: Particles, Atomic force microscopy, Scanning electron microscopy, Nanoparticles, Scattering, Dynamic light scattering, Diffusion, Standards development, Metrology, Nanomaterials

Showing 5 of 18 publications
Conference Committee Involvement (3)
Optical Technology and Measurement for Industrial Applications Conference
20 April 2021 | Chiba, Japan
Optical Technology and Measurement for Industrial Applications Conference
22 April 2020 | Yokohama, Japan
Optical Technology and Measurement for Industrial Applications Conference
23 April 2019 | Yokohama, Japan
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