CONFERENCE PROCEEDINGS
Advanced Search
Satoshi Takada
at Hitachi High-Tech Corp
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 28 March 2017 Presentation + Paper
SEM image prediction based on modeling of electron-solid interaction
Toshimasa Kameda, Satoshi Takada, Makoto Suzuki, Toshiyuki Yokosuka, Sergey Borisov, Sergey Babin
Proceedings Volume 10145, 101451I (2017) https://doi.org/10.1117/12.2257661
KEYWORDS: Monte Carlo methods, Scanning electron microscopy, Image processing, Crystals, Electrons, Metrology, Inspection, Manufacturing, Scattering, Silica, Selenium, Laser scattering, Semiconductors
Proceedings Article | 5 April 2012 Paper
Advanced full-automatic inspection of copper interconnects
S. Takada, N. Ban, T. Ishimoto, N. Suzuki, S. Umehara, L. Carbonell, N. Heylen, R. Caluwaerts, H. Volders, K. Kellens, Z. Tokei
Proceedings Volume 8324, 83242R (2012) https://doi.org/10.1117/12.916254
KEYWORDS: Copper, Inspection, Scanning electron microscopy, Semiconducting wafers, Cadmium sulfide, Resistance, Electrons, Sensors, Defect detection, Optical lithography
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top