Dr. Satoshi Ichimaru
at NTT Advanced Technology
SPIE Involvement:
Publications (11)

Proceedings Article | 4 March 2019 Paper
Proc. SPIE. 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
KEYWORDS: Optical filters, Mirrors, Beam splitters, Polarization, X-rays, CCD cameras, Laser ablation, X-ray lasers, Zirconium, Spherical lenses

Proceedings Article | 9 July 2015 Paper
Proc. SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII
KEYWORDS: Mirrors, Multilayers, Sputter deposition, Silicon, Reflectivity, Interferometry, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 7 October 2005 Paper
Proc. SPIE. 5900, Optics for EUV, X-Ray, and Gamma-Ray Astronomy II
KEYWORDS: Mirrors, Multilayers, Coating, Reflectivity, Extreme ultraviolet, Helium, Silicon carbide, Neodymium, Atmospheric modeling, Atmospheric optics

Proceedings Article | 11 March 2003 Paper
Proc. SPIE. 4851, X-Ray and Gamma-Ray Telescopes and Instruments for Astronomy
KEYWORDS: Reflectors, Telescopes, Mirrors, Reflection, Sensors, X-rays, Reflectivity, Space telescopes, X-ray telescopes, Hard x-rays

Proceedings Article | 30 January 2002 Paper
Proc. SPIE. 4496, X-Ray Optics for Astronomy: Telescopes, Multilayers, Spectrometers, and Missions
KEYWORDS: Telescopes, Mirrors, X-ray optics, Stars, Cameras, Sensors, X-rays, Space telescopes, X-ray telescopes, Hard x-rays

Showing 5 of 11 publications
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