Mr. Scott Corboy Profile

Scott Corboy

Marketing Manager at KLA Singapore

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Publications (2)

Proceedings Article | 24 March 2009 Paper

Using scatterometry to improve process control during the spacer pitch splitting process

Scott Corboy, Craig MacNaughton, Thomas Gubiotti, Marcus Wollenweber

Proceedings Volume 7272, 727245 (2009) https://doi.org/10.1117/12.814349

KEYWORDS: Semiconducting wafers, Metrology, Scatterometry, Process control, Lithography, Optical lithography, Etching, High volume manufacturing, Integrated optics, Wafer-level optics

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Proceedings Article | 4 December 2008 Paper

Using scatterometry to improve process control during the spacer pitch splitting process

Scott Corboy, Craig MacNaughton, Thomas Gubiotti, Marcus Wollenweber

Proceedings Volume 7140, 714025 (2008) https://doi.org/10.1117/12.804578

KEYWORDS: Semiconducting wafers, Metrology, Scatterometry, Lithography, Process control, Optical lithography, Etching, High volume manufacturing, Integrated optics, Wafer-level optics

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