Mr. Scott J. Hafeman Profile

Scott J. Hafeman

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Publications (2)

Proceedings Article | 28 May 2004 Paper

Fast algorithm for extraction of worst-case image degradation due to flare

Scott Hafeman, Frank Gennari, Andrew Neureuther

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.535832

KEYWORDS: Point spread functions, Optical transfer functions, Fourier transforms, Photomasks, Light scattering, Optical proximity correction, Convolution, Feature extraction, Scattering, Manufacturing

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Proceedings Article | 26 June 2003 Paper

Simulation of imaging and stray light effects in immersion lithography

Scott Hafeman, Andrew Neureuther

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485460

KEYWORDS: Liquids, Immersion lithography, Imaging systems, Image quality, Polarization, 3D modeling, Scattering, Photomasks, Image filtering, Scanning tunneling microscopy

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