Dr. Scott W. Jessen
RET Technical Manager at Texas Instruments Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (14)

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Scanners, Silicon, Photomasks, Source mask optimization, Optical proximity correction, Semiconducting wafers

Proceedings Article | 29 March 2011 Paper
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Metrology, Cadmium, Calibration, Atomic force microscopy, Scanning electron microscopy, Photoresist materials, Process control, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 3 April 2010 Paper
Proc. SPIE. 7641, Design for Manufacturability through Design-Process Integration IV
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Scanning electron microscopy, Photomasks, Double patterning technology, Optical proximity correction, Semiconducting wafers, Fiber optic illuminators

Proceedings Article | 13 March 2009 Paper
Proc. SPIE. 7275, Design for Manufacturability through Design-Process Integration III
KEYWORDS: Lithography, Logic, Optical lithography, Visualization, Metals, Computer simulations, Distributed computing, Photomasks, Raster graphics, Resolution enhancement technologies

Proceedings Article | 17 March 2008 Paper
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Logic, Lithographic illumination, Printing, Design for manufacturing, Photomasks, Optical proximity correction, SRAF, Critical dimension metrology, Model-based design

Showing 5 of 14 publications
Conference Committee Involvement (12)
Advances in Patterning Materials and Processes XXXVIII
22 February 2021 | Online Only, California, United States
Advances in Patterning Materials and Processes XXXVII
24 February 2020 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVI
25 February 2019 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXV
27 February 2018 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIV
28 February 2017 | San Jose, California, United States
Showing 5 of 12 Conference Committees
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