Dr. Sebastian Bütefisch Profile

Dr. Sebastian Bütefisch

at Physikalisch Technische Bundesanstalt

SPIE Involvement:

Author

Publications (8)

Proceedings Article | 7 March 2019 Paper

Micro Coordinate Measurement Machine (uCMM) using voice coil actuator with interferometric position feedback

Liang Yu, Gabor Molnar, Sebastian Bütefisch, Christian Werner, Rudolf Meeß, Hans-Ulrich Danzebrink, Jens Flügge

Proceedings Volume 11053, 110531S (2019) https://doi.org/10.1117/12.2511527

KEYWORDS: Actuators, Mirrors, Interferometry, Sensors, Interferometers, Optical spheres, Control systems, Field programmable gate arrays, Signal processing

Read Abstract +

Proceedings Article | 11 September 2018 Paper

Direct measurement of negative light pressure by means of PTBs nanonewton force facility

D. Nies, V. Nesterov, O. Belai, J. Kirchhoff, S. Bütefisch, M. Mueller

Proceedings Volume 10723, 107233A (2018) https://doi.org/10.1117/12.2500399

KEYWORDS: Polarization, Optical testing, Electrodes, Control systems, Extraordinary optical transmission, Optical manipulation, Optical tweezers, Surface plasmons

Read Abstract +

Proceedings Article | 16 September 2016 Paper

Experimental setup for the direct measurement of a light-induced attractive force between two metal bodies

D. Nies, Sebastian Buetefisch, Dirk Naparty, M. Wurm, O. Belai, D. Shapiro, V. Nesterov

Proceedings Volume 9922, 99222L (2016) https://doi.org/10.1117/12.2235901

KEYWORDS: Metals, Sensors, Photodiodes, Magnetism, Electrodes, Silicon, Interferometers, Semiconductor lasers, Polarization, Thermal effects

Read Abstract +

Proceedings Article | 21 May 2015 Paper

Smart sensors and calibration standards for high precision metrology

Uwe Brand, Sai Gao, Lutz Doering, Zhi Li, Min Xu, Sebastian Buetefisch, Erwin Peiner, Joachim Fruehauf, Karla Hiller

Proceedings Volume 9517, 95170V (2015) https://doi.org/10.1117/12.2179455

KEYWORDS: Silicon, Standards development, Calibration, Microelectromechanical systems, Sensors, Microtechnology, Metrology, Atomic force microscopy, Sensor calibration, Bridges

Read Abstract +

Proceedings Article | 8 October 2001 Paper

New pneumatically actuated miniature gripper for micro assembly

Sebastian Buetefisch, Stephanus Buettgenbach

Proceedings Volume 4568, (2001) https://doi.org/10.1117/12.444142

KEYWORDS: Actuators, Silicon, Semiconducting wafers, Etching, Reactive ion etching, Lithography, Copper, Shape memory alloys, Dry etching, Photomasks

Read Abstract +

Proceedings Article | 8 October 2001 Paper

Centering electrostatic microgripper and magazines for microassembly tasks

Juergen Hesselbach, Stephanus Buettgenbach, Jan Wrege, Sebastian Buetefisch, Christiane Graf

Proceedings Volume 4568, (2001) https://doi.org/10.1117/12.444126

KEYWORDS: Electrodes, Optical spheres, Particles, Dielectric polarization, Electrons, Chemical species, 3D modeling, Finite element methods, Manufacturing, Adhesives

Read Abstract +

Proceedings Article | 8 October 2001 Paper

Silicon three-axial tactile probe for the mechanical characterization of microgrippers

Sebastian Buetefisch, Ralph Wilke, Stephanus Buettgenbach

Proceedings Volume 4568, (2001) https://doi.org/10.1117/12.444145

KEYWORDS: Sensors, Silicon, Calibration, Actuators, Shape memory alloys, Assembly equipment, Glasses, Chemical elements, Assembly tolerances, Resistors

Read Abstract +

Proceedings Article | 21 March 2001 Paper

New differential-type SMA actuator for a miniature silicon gripper

Sebastian Buetefisch, Stephanus Buettgenbach

Proceedings Volume 4235, (2001) https://doi.org/10.1117/12.420896

KEYWORDS: Actuators, Shape memory alloys, Silicon, Etching, Assembly tolerances, Micromachining, Finite element methods, Semiconductor lasers, Prototyping, Microtechnology

Read Abstract +

Showing 5 of 8 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years