Dr. Sebastian Döring Profile

Dr. Sebastian Döring

at Fraunhofer Institut fur Photonische Mikrosysteme

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 28 February 2020 Paper

A. Gehner, S. Döring, D. Rudloff, D. Kunze, P. Dürr, S. Francés, L. Hänsel, H. Torlee, A. Elgner, M. Eckert, M. Friedrichs, J. Heber, J. Schmidt, W. Pufe, C. Hohle, M. Schulze, M. Wagner

Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX

KEYWORDS: Actuators, Mirrors, Optical lithography, Calibration, Micromirrors, CMOS technology, Analog electronics

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Keywords/Phrases