Dr. Sebastian Kranzusch Profile

Dr. Sebastian Kranzusch

at Laser-Lab Göttingen eV

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 20 May 2004 Paper

Compact laser-induced EUV source for metrology

Klaus Mann, F. Barkusky, Stefan Doering, Sebastian Kranzusch, A. Meyer, Christian Peth

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.532871

KEYWORDS: Extreme ultraviolet, Plasma, Sensors, Wavefronts, Gas lasers, Coded apertures, Laser drilling, Xenon, Laser development, Wavefront sensors

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Proceedings Article | 7 January 2004 Paper

Plasma generation and characterization in the extreme ultraviolet spectral range

Sebastian Kranzusch, Christian Peth, Stefan Doering, Klaus Mann

Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.509324

KEYWORDS: Extreme ultraviolet, Plasma, Coded apertures, Laser induced fluorescence, Gas lasers, Luminescence, Xenon, Cameras, X-rays, Visualization

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Proceedings Article | 16 June 2003 Paper

Spatial emission characteristics of EUV plasma sources

Klaus Mann, Sebastian Kranzusch, Christian Peth, Max Schurmann, Thomas Missalla

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.482748

KEYWORDS: Extreme ultraviolet, Plasma, Coded apertures, Laser induced fluorescence, Xenon, Gas lasers, Luminescence, Visualization, Absorption, Laser development

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Proceedings Article | 16 June 2003 Paper

Metrology tools for EUVL-source characterization and optimization

Max Schuermann, Thomas Missalla, Klaus Mann, Sebastian Kranzusch, Roman Klein, Frank Scholze, Gerhard Ulm, Rainer Lebert, Larissa Juschkin

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.482667

KEYWORDS: Calibration, Extreme ultraviolet, Mirrors, Extreme ultraviolet lithography, Plasma, Metrology, Optical filters, Spectrographs, Photodiodes, Multilayers

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Proceedings Article | 11 November 2002 Paper

Optical metrology in the VUV and EUV spectral range

Klaus Mann, Sebastian Kranzusch, G. Eckert, Christian Gorling, Uwe Leinhos, Christian Peth, Bernd Schafer

Proceedings Volume 4779, (2002) https://doi.org/10.1117/12.455923

KEYWORDS: Absorption, Fluorine, Photons, Vacuum ultraviolet, Laser induced fluorescence, Solar thermal energy, Thermal effects, Wavefront sensors, Optical metrology, Extreme ultraviolet

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