Dr. Seema Vinayak Profile

Dr. Seema Vinayak

at Solid State Physics Lab

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Publications (2)

Proceedings Article | 15 October 2012 Paper

Cl2/Ar based Inductively Coupled Plasma Etching of GaN/AlGaN Structure

D. Rawal, Henika Arora, V. Agarwal, Ashok Kapoor, Seema Vinayak, B. Sehgal, R. Muralidharan, Dipankar Saha, H. Malik

Proceedings Volume 8549, 85490L (2012) https://doi.org/10.1117/12.925529

KEYWORDS: Etching, Gallium nitride, Plasma, Ions, Plasma etching, Aluminum, Surface roughness, Chlorine, Photoresist materials, Anisotropic etching

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Proceedings Article | 15 September 1995 Paper

Parametral dependence of bilevel-interconnect formation in GaAs ICs/MMICs

Seema Vinayak, B. Sehgal, G. Sai Sarvanan, Sindhu Dayal, D. Rawal, Akshay Naik, R. Gulati, I. Chandra

Proceedings Volume 2636, (1995) https://doi.org/10.1117/12.221139

KEYWORDS: Metals, Platinum, Gold, Gallium arsenide, Silicon, Silicon films, Dielectrics, Sputter deposition, Plasma enhanced chemical vapor deposition, Multilayers

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