Mr. Seiichi Nakazawa Profile

Seiichi Nakazawa

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Publications (3)

Proceedings Article | 17 October 2014 Paper

EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond

Hidekazu Takekoshi, Takahito Nakayama, Kenichi Saito, Hiroyoshi Ando, Hideo Inoue, Noriaki Nakayamada, Takashi Kamikubo, Rieko Nishimura, Yoshinori Kojima, Jun Yashima, Akihito Anpo, Seiichi Nakazawa, Tomohiro Iijima, Kenji Ohtoshi, Hirohito Anze, Victor Katsap, Steven Golladay, Rodney Kendall

Proceedings Volume 9235, 92350X (2014) https://doi.org/10.1117/12.2065551

KEYWORDS: Photomasks, Electron beam melting, Electron beams, Data conversion, Amplifiers, LCDs, Mask making, Seaborgium, Beam shaping

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Proceedings Article | 28 July 2014 Paper

EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond

Proceedings Volume 9256, 925607 (2014) https://doi.org/10.1117/12.2065230

KEYWORDS: Photomasks, Electron beam melting, Amplifiers, Electron beams, Logic, LCDs, Mask making, Objectives, Vestigial sideband modulation

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Proceedings Article | 30 January 2013 Paper

Development of convenient nitrogen laser by using control of discharge

Seiichi Nakazawa, Eiichiro Yamaguchi, Yoshio Ishii

Proceedings Volume 8677, 86770H (2013) https://doi.org/10.1117/12.2010505

KEYWORDS: Nitrogen lasers, Mechanoluminescence, Nitrogen, Laser development, Gas lasers, Switches, Beam controllers, Molecules, Control systems, Ultraviolet radiation

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