Seiichi Nakazawa
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 17 October 2014 Paper
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Electron beams, Seaborgium, Amplifiers, LCDs, Photomasks, Beam shaping, Electron beam melting, Mask making, Data conversion

Proceedings Article | 28 July 2014 Paper
Proc. SPIE. 9256, Photomask and Next-Generation Lithography Mask Technology XXI
KEYWORDS: Electron beams, Logic, Amplifiers, LCDs, Objectives, Photomasks, Electron beam melting, Mask making, Vestigial sideband modulation

Proceedings Article | 30 January 2013 Paper
Proc. SPIE. 8677, XIX International Symposium on High-Power Laser Systems and Applications 2012
KEYWORDS: Switches, Ultraviolet radiation, Molecules, Mechanoluminescence, Nitrogen, Laser development, Control systems, Gas lasers, Nitrogen lasers, Beam controllers

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