Seongbo Shim
SPIE Involvement:
Publications (13)

Proceedings Article | 30 March 2017 Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: 3D modeling, Lithography, Image processing, 3D image processing, Artificial neural networks, Computer simulations, Photoresist processing, Machine learning, Etching, Resistance, Metals, Data modeling, Standards development

Proceedings Article | 23 March 2016 Paper
Proc. SPIE. 9782, Advanced Etch Technology for Nanopatterning V
KEYWORDS: Etching, Artificial neural networks, Optical proximity correction, Machine learning, Optical lithography, Critical dimension metrology, Neural networks, Geometrical optics

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Metals, Bessel functions, Raster graphics

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Global Positioning System, Lithography, Machine learning, Photomasks, Polymers, Optical lithography, Optical proximity correction, 193nm lithography, Electrical engineering, Directed self assembly

Proceedings Article | 28 March 2014 Paper
Proc. SPIE. 9053, Design-Process-Technology Co-optimization for Manufacturability VIII
KEYWORDS: Metals, Lithography, Double patterning technology, Image classification, Tolerancing, Semiconductors, Raster graphics, Fourier transforms, Vector spaces, Electrical engineering

Showing 5 of 13 publications
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