Mr. Seongchul Hong Profile

Seongchul Hong

at Hanyang Univ

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Publications (2)

Proceedings Article | 13 March 2015 Paper

Evaluation of optical properties of EUV resist underlayer

Jung Sik Kim, Seongchul Hong, Jae Uk Lee, Seung Min Lee, Jung Hwan Kim, Hyun Min Song, Jinho Ahn

Proceedings Volume 9422, 94222E (2015) https://doi.org/10.1117/12.2085755

KEYWORDS: Refractive index, Photons, Photoresist materials, Extreme ultraviolet lithography, Extreme ultraviolet, Critical dimension metrology, Stochastic processes, Line edge roughness, Optical properties, Lithography

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Proceedings Article | 1 April 2013 Paper

Stochastic resist patterning simulation using attenuated PSM for EUV lithography

Seongchul Hong, Seejun Jeong, Jae Uk Lee, Seung Min Lee, Jongseok Kim, Jonggul Doh, Jinho Ahn

Proceedings Volume 8679, 867928 (2013) https://doi.org/10.1117/12.2011362

KEYWORDS: Optical lithography, Photomasks, Extreme ultraviolet lithography, Phase shifts, Line edge roughness, Line width roughness, Extreme ultraviolet, Stochastic processes, Critical dimension metrology, Molybdenum

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