Dr. Serdar Manakli
CEO at Aselta Nanographics
SPIE Involvement:
Author
Publications (24)

Proceedings Article | 21 March 2012 Paper
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Metals, Electron beam lithography, Logic, Electroluminescence, Lithography, Optical lithography, Semiconducting wafers, Maskless lithography, Data modeling, Modulation

Proceedings Article | 14 October 2011 Paper
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Modulation, Electron beam lithography, Cadmium sulfide, Algorithm development, Point spread functions, Metals, Data corrections, Photomasks, Critical dimension metrology, Optics manufacturing

Proceedings Article | 4 April 2011 Paper
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Electroluminescence, Electron beam lithography, Line edge roughness, Electron beam direct write lithography, Lithography, Modulation, Standards development, Semiconducting wafers, Optical lithography, Logic

Proceedings Article | 1 April 2010 Paper
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Electroluminescence, Modulation, Line edge roughness, Electron beam lithography, Semiconducting wafers, Logic, Metals, Etching, Electron beam direct write lithography, Electron beams

Proceedings Article | 23 September 2009 Paper
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Data modeling, 3D modeling, Electron beam direct write lithography, Point spread functions, Critical dimension metrology, Model-based design, Geometrical optics, Cadmium, Error analysis, Virtual reality

Showing 5 of 24 publications
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