Dr. Sergey Yu Shevchenko Profile

Dr. Sergey Yu Shevchenko

at Saint Petersburg Electrotechnical Univ "LETI"

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 16 May 2017 Paper

Experimental study of laser trimmed surface acoustic wave delay line topologies

Dmitry Lukyanov, Sergey Shevchenko, Alexander Kukaev, Daniil Safronov

Proceedings Volume 10231, 102311T (2017) https://doi.org/10.1117/12.2265675

KEYWORDS: Metals, Copper, Aluminum, Resonators, Quartz, Sensors, Photomasks, Acoustics, Semiconducting wafers, Laser ablation, Microelectromechanical systems, Optical lithography

Read Abstract +

Proceedings Article | 9 November 2016 Paper

Optical methods for correction of surface acoustic wave sensors topology

Dmitry Lukyanov, Sergey Shevchenko, Alexander Kukaev, Daniil Safronov

Proceedings Volume 10018, 100180H (2016) https://doi.org/10.1117/12.2246438

KEYWORDS: Acoustics, Sensors, Laser ablation, Optical lithography, Photomasks, Semiconducting wafers, Optical calibration, Wave sensors, Resonators, Quartz

Read Abstract +