Prof. Sergey P. Timoshenkov Profile

Prof. Sergey P. Timoshenkov

Professor, Head of Chair at National Research Univ of Electronic Technology

SPIE Involvement:

Author

Publications (24)

Proceedings Article | 31 January 2022 Paper

Investigation of the gas-phase deposition of material layers in plasma-vacuum systems for MEMS production processes

V. Samoylikov, S. Timoshenkov, S. Evstafyev

Proceedings Volume 12157, 121570L (2022) https://doi.org/10.1117/12.2619681

KEYWORDS: Silicon, Semiconducting wafers, Deposition processes, Microelectromechanical systems, Visualization, Mathematical modeling, Plasma, Analog electronics, Thermal effects

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Proceedings Article | 31 January 2022 Paper

Designing thermal MEMS on a system level

S. Evstafyev, V. Samoylikov, S. Timoshenkov, P. Gornostaev

Proceedings Volume 12157, 121570M (2022) https://doi.org/10.1117/12.2619684

KEYWORDS: Actuators, Microactuators, Computer aided design, Microelectromechanical systems, Mirrors, Manufacturing, Mathematical modeling, Algorithm development, Structural design

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Proceedings Article | 15 March 2019 Paper

ANSYS simulation of the microaccelerometer sensor

S. Timoshenkov, V. Kalugin, S. Anchutin, E. Kochurina

Proceedings Volume 11022, 110220S (2019) https://doi.org/10.1117/12.2521783

KEYWORDS: Etching, Sensors, Chemical elements, Electrodes, Finite element methods, Silicon, Control systems, Plasma, Manufacturing, Microelectromechanical systems

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Proceedings Article | 15 March 2019 Paper

Concept of glass formation in chalcogenide systems and the possibility of predicting new compounds for micro- and nanoelectronics

Natalia Korobova, Sergey Timoshenkov, Viktor Minaev

Proceedings Volume 11022, 110221H (2019) https://doi.org/10.1117/12.2521720

KEYWORDS: Glasses, Chalcogenides, Binary data, Chemical elements, Tellurium, Chemical species, Gallium, Thallium, Crystals, Switches

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Proceedings Article | 15 March 2019 Paper

Investigation of technological operations for manufacturing 3D micro-assemblies with embedded elements

S. Kruchinin, S. Timoshenkov

Proceedings Volume 11022, 110221W (2019) https://doi.org/10.1117/12.2521797

KEYWORDS: Polymers, Etching, Manufacturing, Adhesives, Dielectrics, Silicon, Plasma etching

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Proceedings Article | 30 December 2016 Paper

Study of morphological characteristic of por-Si formed using metal-assisted chemical etching by BET-method and fractal geometry

Anton Boyko, Olga Pyatilova, Rustam Kalmykov, Dahir Gaev, Sergei Timoshenkov, Sergei Gavrilov

Proceedings Volume 10224, 102240H (2016) https://doi.org/10.1117/12.2267147

KEYWORDS: Fractal analysis, Wet etching, Silicon, Scanning electron microscopy, Adsorption, Detection and tracking algorithms, Solids, Thermodynamics, Etching, Metals

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Proceedings Article | 30 December 2016 Paper

Chemical surface treatment of Ge2Sb2Te5 thin films for phase change memory application

M. Mikhailova, S. Nemtseva, V. Glukhenkaya, P. Lazarenko, A. Sherchenkov, S. Kozyukhin, S. Timoshenkov

Proceedings Volume 10224, 102240F (2016) https://doi.org/10.1117/12.2267157

KEYWORDS: Thin films, Etching, Antimony, Tellurium, Germanium, Oxides, Electrodes, Atomic force microscopy, Chemical elements, Microelectronics

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Proceedings Article | 30 December 2016 Paper

Some important aspects in the glass structure of chalcogenide systems

Viktor Minaev, Sergey Timoshenkov, Natalia Korobova, Viktor Kalugin

Proceedings Volume 10224, 102240G (2016) https://doi.org/10.1117/12.2266801

KEYWORDS: Glasses, Chalcogenides, Tellurium, Selenium, Binary data, Crystals, Liquid crystals, Chemical elements, Liquids, Germanium

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Proceedings Article | 23 September 2016 Paper

Electro-optical and physic-mechanical properties of colored alicyclic polyimide

V. Kravtsova, M. Umerzakova, N. Korobova, S. Timoshenkov, V. Timoshenkov, S. Orlov, R. Iskakov, O. Prikhodko

Proceedings Volume 9939, 99390R (2016) https://doi.org/10.1117/12.2236929

KEYWORDS: Transmittance, Dielectrics, Electro optics, Polymers, Heat treatments, Ultraviolet radiation, Thermography, Dysprosium, Resistance, Active optics

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Proceedings Article | 22 December 2015 Paper

Calculation of the dynamic characteristics of micro-mirror element based on thermal micro-actuators

Sergey Evstafyev, Sergey Timoshenkov, Vyacheslav Samoilykov, Natalia Korobova, Alexey Timoshenkov, Anatolij Tereshhenko

Proceedings Volume 9668, 966823 (2015) https://doi.org/10.1117/12.2202444

KEYWORDS: Aluminum, Silica, Mirrors, Actuators, Silicon, Chemical elements, Microactuators

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Proceedings Article | 22 December 2015 Paper

Investigation of emission properties of vacuum diodes with nanodiamond-graphite emitters

E. Gornev, S. Orlov, R. Yafarov, S. Timoshenkov, V. Timoshenkov, A. Timoshenkov

Proceedings Volume 9668, 96682T (2015) https://doi.org/10.1117/12.2202812

KEYWORDS: Silicon, Diodes, Semiconducting wafers, Microwave radiation, Plasma, Bioalcohols, Carbon, Silicon carbide, Electronics, Microelectronics

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Proceedings Article | 22 May 2015 Paper

A bimorph electrothermal actuator for micromirror devices

Sergey Evstafyev, Sergey Timoshenkov, Igor Britkov, Vyacheslav Samoilykov, Anatolij Tereshhenko

Proceedings Volume 9467, 94672X (2015) https://doi.org/10.1117/12.2176817

KEYWORDS: Micromirrors, Actuators, Mirrors, Silica, Microopto electromechanical systems, Prototyping, Silicon, Aluminum, Microactuators, Optics manufacturing

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Proceedings Article | 22 May 2015 Paper

Comb structure analysis of the capacitive sensitive element in MEMS-accelerometer

Andrew Shalimov, Sergey Timoshenkov, Natalia Korobova, Maxim Golovinskiy, Alexey Timoshenkov, Egor Zuev, Svetlana Berezueva, Andrey Kosolapov

Proceedings Volume 9467, 94672W (2015) https://doi.org/10.1117/12.2176815

KEYWORDS: Microelectromechanical systems, Capacitance, Chemical elements, Computer aided design, Algorithm development, Bridges, Analytical research, Capacitors, Sensors, Molecular bridges

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Proceedings Article | 21 May 2015 Paper

Research and development of capacitive transducer with linear acceleration

Natalia Korobova, Elena Kochurina, Sergey Timoshenkov, Yuriy Chaplygin, Stepan Anchutin, Andrey Kosolapov

Proceedings Volume 9517, 951725 (2015) https://doi.org/10.1117/12.2181202

KEYWORDS: Transducers, Silicon, Sensors, Manufacturing, Anisotropic etching, Etching, Magnesium, Capacitance, Microelectromechanical systems, Analog electronics

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Proceedings Article | 21 May 2015 Paper

Features design and manufacturing technology in microelectromechanical encapsulated devices

O. Britkov, S. Timoshenkov, N. Korobova, S. Shepelev, A. Mikheev

Proceedings Volume 9517, 95171Z (2015) https://doi.org/10.1117/12.2180923

KEYWORDS: Gyroscopes, Silicon, Microelectromechanical systems, Chemical elements, Manufacturing, Annealing, Sensors, Infrared spectroscopy, Design for manufacturability, Etching

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