Dr. Sergey I. Zaitsev Profile

Dr. Sergey I. Zaitsev

Head of Lab at Institute of Microelectronics Technology-HPM

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Publications (10)

Proceedings Article | 4 January 2021 Paper

Modelling the point source function for collimators employed in radio guided surgery and SPECT

Yana Shabelnikova, Sergey Zaitsev, Vasiliy Obolenskiy

Proceedings Volume 11605, 116050A (2021) https://doi.org/10.1117/12.2587441

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Proceedings Article | 18 March 2009 Paper

3D ion multibeam processing with the CHARPAN PMLP tool and with the single ion-beam FIB tool optimized with the IonRevSim software

S. Zaitsev, A. Svintsov, C. Ebm, S. Eder-Kapl, H. Loeschner, E. Platzgummer, G. Lalev, S. Dimov, V. Velkova, B. Basnar

Proceedings Volume 7271, 72712P (2009) https://doi.org/10.1117/12.814158

KEYWORDS: Ions, Sputter deposition, 3D modeling, Etching, Ion beams, Isotropic etching, Process modeling, Optical simulations, Software development, Microlens

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Proceedings Article | 18 March 2009 Paper

Optimization of droplets for UV-NIL using coarse-grain simulation of resist flow

Vadim Sirotkin, Alexander Svintsov, Sergey Zaitsev

Proceedings Volume 7271, 72712I (2009) https://doi.org/10.1117/12.813959

KEYWORDS: Computer simulations, Mathematical modeling, 3D modeling, Motion models, Nanoimprint lithography, Photoresist processing, Computing systems, Finite difference methods, Numerical analysis, Ultraviolet radiation

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Proceedings Article | 10 June 2006 Paper

Current density and exposure sequence effect in electron lithography

S. Dubonos, M. Knyazev, A. Svintsov, S. Zaitsev

Proceedings Volume 6260, 626002 (2006) https://doi.org/10.1117/12.676910

KEYWORDS: Thulium, Molecules, Lithography, Polymethylmethacrylate, Polymers, Electron beams, Diffusion, Molecular interactions, Electron beam lithography, Acquisition tracking and pointing

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Proceedings Article | 31 May 2006 Paper

Determination of subsurface structure parameters of a sample using secondary electrons energy spectrums

S. Borisov, S. Zaitsev, A. Bloshenko, T. Misutina

Proceedings Volume 6278, 62780L (2006) https://doi.org/10.1117/12.693212

KEYWORDS: Electrons, Aluminum, Gold, Simulation of CCA and DLA aggregates, Scattering, Laser scattering, Astatine, Monte Carlo methods, Solids, Electron beams

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Proceedings Article | 31 May 2006 Paper

Simulation of electron scattering in thin films using Monte-Carlo method in discrete looses approximation

S. Borisov, S. Zaitsev, E. Grachev, N. Ivanov

Proceedings Volume 6278, 62780I (2006) https://doi.org/10.1117/12.693208

KEYWORDS: Monte Carlo methods, Thin films, Simulation of CCA and DLA aggregates, Scattering, Gold, Computer simulations, Ionization, Chlorine, Solids, Statistical analysis

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Proceedings Article | 31 May 2006 Paper

Computation of charge and energy deposited during electron beam irradiation depth distributions in discrete looses approximation

S. Borisov, S. Zaitsev, E. Grachev

Proceedings Volume 6278, 62780K (2006) https://doi.org/10.1117/12.693211

KEYWORDS: Simulation of CCA and DLA aggregates, Silicon, Gallium nitride, Monte Carlo methods, Gold, Silver, Electron beams, Optical simulations, Copper, Particles

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Proceedings Article | 31 May 2006 Paper

One particularity of energy-angular secondary electrons spectrum

S. Borisov, S. Zaitsev

Proceedings Volume 6278, 62780J (2006) https://doi.org/10.1117/12.693210

KEYWORDS: Electrons, Monte Carlo methods, Scattering, Gold, Simulation of CCA and DLA aggregates, Solids, Laser scattering, Computer simulations, Photonic integrated circuits, Diagnostics

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Proceedings Article | 1 March 2004 Paper

Electron beam with homogeneous solids interaction simulation using Monte-Carlo method in discrete looses approximation

S. Borisov, Eugene Grachev, S. Zaitsev

Proceedings Volume 5398, (2004) https://doi.org/10.1117/12.552147

KEYWORDS: Monte Carlo methods, Solids, Silicon, Electron beams, Optical simulations, Scanning electron microscopy, Ionization, Plasmons, Photonic integrated circuits, Gold

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Proceedings Article | 1 March 2004 Paper

Modeling of dielectric polarization during an electron beam exposure

S. Borisov, Eugene Grachev, S. Zaitsev, N. Negulyaev, E. Cheremukhin

Proceedings Volume 5398, (2004) https://doi.org/10.1117/12.552222

KEYWORDS: Dielectric polarization, Electron beams, Ionization, Solid modeling, Solids, Scattering, Chemical species, Metals, Particles, Polymethylmethacrylate

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Showing 5 of 10 publications

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